- 专利标题: Sputtering target for a physical vapor deposition chamber
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申请号: US29703194申请日: 2019-08-26
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公开(公告)号: USD908645S1公开(公告)日: 2021-01-26
- 设计人: Kirankumar Neelasandra Savandaiah , David Gunther , Siew Kit Hoi
- 申请人: APPLIED MATERIALS, INC.
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Moser Taboada
- LOC分类号: 1303