再颁专利
- 专利标题: Method for crucible-free zone meeting of semiconductor crystal rods
- 专利标题(中): 半导体晶体棒无坩埚区会议的方法
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申请号: US778587申请日: 1977-03-17
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公开(公告)号: USRE30863E公开(公告)日: 1982-02-09
- 发明人: Wolfgang Keller
- 申请人: Wolfgang Keller
- 申请人地址: DEX Berlin & Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Berlin & Munich
- 优先权: DEX2358300 19731122
- 主分类号: C30B13/00
- IPC分类号: C30B13/00 ; C30B13/28 ; C30B29/06 ; H01L21/208
摘要:
Polycrystalline semiconductor rods are converted to dislocation-free monocrystal rods by positioning a polycrystalline rod within a crucible-free zone melt environment with a seed crystal attached to one end thereof, generating a melt zone at the juncture of the seed crystal and the polycrystalline rod, controllably moving the melt zone away from the juncture and through the polycrystalline rod to a select point thereon, uniformly supporting the cone-shaped lower portion of the rod being processed so as to prevent oscillations and the like at the juncture of the rod in the seed crystal and controllably moving the melt zone from the select point to the remainder of the rod. A uniform support is preferably provided by an axially movable funnel-shaped casing which is attached to the seed crystal holding member and which, when moved into its operating position, is filled with a self-adjusting oscillation or vibration dampening means, such as molten metal, metal spheroids, quartz particles, sand, etc.
公开/授权文献
- US5777550A High reliability instrument system 公开/授权日:1998-07-07
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