再颁专利
- 专利标题: Tapping atomic force microscope with phase or frequency detection
- 专利标题(中): 用相位或频率检测攻丝原子力显微镜
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申请号: US82320申请日: 1998-05-21
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公开(公告)号: USRE36488E公开(公告)日: 2000-01-11
- 发明人: Virgil B. Elings , John A. Gurley
- 申请人: Virgil B. Elings , John A. Gurley
- 申请人地址: NY Plainview
- 专利权人: Veeco Instruments Inc.
- 当前专利权人: Veeco Instruments Inc.
- 当前专利权人地址: NY Plainview
- 主分类号: G01Q60/24
- IPC分类号: G01Q60/24 ; G01Q60/34 ; G01B7/34
摘要:
An atomic force microscope in which a probe tip is oscillated at a resonant frequency and at amplitude setpoint and scanned across the surface of a sample, which may include an adsorbed water layer on its surface, at constant amplitude in intermittent contact with the sample and changes in phase or in resonant frequency of the oscillating are measured to determine adhesion between the probe tip and the sample. The setpoint amplitude of oscillation of the probe is greater than 10 nm to assure that the energy in the lever arm is much higher than that lost in each cycle by striking the sample surface, thereby to avoid sticking of the probe tip to the sample surface. In one embodiment the probe tip is coated with an antibody or an antigen to locate corresponding antigens or antibodies on the sample as a function of detected variation in phase or frequency. In another embodiment, the frequency of oscillation of the probe tip is modulated and relative changes in phase of the oscillating probe tip observed in order to measure the damping of the oscillation due to the intermittent or constant tapping of the surface by the tip. In a further embodiment, the slope of the phase versus frequency curve is determined and outputted during translating of the oscillating probe. Force dependent sample characteristics are determined by obtaining data at different tapping amplitude setpoints and comparing the data obtained at the different tapping amplitude setpoints.
公开/授权文献
- US4359663A Gas discharge panel having plurality of shift electrodes 公开/授权日:1982-11-16
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