再颁专利
- 专利标题： 300 mm microenvironment pod with door on side
- 专利标题（中）： 300 mm微环境荚，侧面有门
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申请号： US10310069申请日： 1995-10-13
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公开(公告)号： USRE41231E1公开(公告)日： 2010-04-20
- 发明人: Barry Gregerson , Gary Gallagher , Brian Wiseman
- 申请人： Barry Gregerson , Gary Gallagher , Brian Wiseman
- 申请人地址： US MA Billerica
- 专利权人： Entegris, Inc.
- 当前专利权人： Entegris, Inc.
- 当前专利权人地址： US MA Billerica
- 代理机构： Patterson, Thuene, Skaar & Christensen PA
- 国际申请： PCT/US95/12516 WO 19951013
- 国际公布： WO97/13710 WO 19970417
- 主分类号： B65D85/90
- IPC分类号： B65D85/90
摘要：
A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.
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