- 专利标题: Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced
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申请号: US10229396申请日: 2002-08-26
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公开(公告)号: USRE41856E1公开(公告)日: 2010-10-26
- 发明人: Paolo Ferrari , Benedetto Vigna , Pietro Montanini , Marco Ferrera
- 申请人: Paolo Ferrari , Benedetto Vigna , Pietro Montanini , Marco Ferrera
- 申请人地址: IT Agrate (Brianza)
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate (Brianza)
- 代理商 David V. Carlson; Lisa K. Jorgenson
- 优先权: EP97830407 19970731
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01P9/04
摘要:
A movable mass forming a seismic mass is formed starting from an epitaxial layer and is covered by a weighting region of tungsten which has high density. To manufacture the mass, buried conductive regions are formed in the substrate. Then, at the same time, a sacrificial region is formed in the zone where the movable mass is to be formed and oxide insulating regions are formed on the buried conductive regions so as to partially cover them. An epitaxial layer is then grown, using a nucleus region. A tungsten layer is deposited and defined and, using a silicon carbide layer as mask, the suspended structure is defined. Finally, the sacrificial region is removed, forming an air gap.