再颁专利
USRE42650E1 Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
有权
液位计接近传感器和使用调制流体流动操作相同方法
- 专利标题: Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
- 专利标题(中): 液位计接近传感器和使用调制流体流动操作相同方法
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申请号: US11831558申请日: 2007-07-31
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公开(公告)号: USRE42650E1公开(公告)日: 2011-08-30
- 发明人: Daniel N. Galburt , Earl W. Ebert , Joseph H. Lyons
- 申请人: Daniel N. Galburt , Earl W. Ebert , Joseph H. Lyons
- 申请人地址: NL Veldhoven
- 专利权人: ASML Holding N.V.
- 当前专利权人: ASML Holding N.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号: G01B13/08
- IPC分类号: G01B13/08
摘要:
A system and method that use a fluid gauge proximity sensor. A source of modulated unidirectional or alternating fluid flow travels along at least one path having a nozzle and a flow or pressure sensor. The fluid exists at a gap between the nozzle and a target. The sensor outputs an amplitude modulated signal that varies according to a size of the gap. The amplitude modulated signal is processed either digitally or in analog devices, which can include being filtered (e.g., band pass, band limited, high pass, etc. filter) to include the modulated frequency and sufficient bandwidth on either side of that frequency and/or being demodulated using a demodulator operating at the acoustical driver modulation frequency. Using this system and method can result in only ambient acoustical energy in a desired frequency range of the device actually having the opportunity to interfere with the device operation. This can lower the devices overall sensitivity to external acoustical noise and sensor offset.
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