公开(公告)号：US07134321B2

公开(公告)日：2006-11-14

申请号：US10894028

申请日：2004-07-20

申请人： Daniel N. Galburt ,  Earl W. Ebert ,  Joseph H. Lyons

发明人： Daniel N. Galburt ,  Earl W. Ebert ,  Joseph H. Lyons

IPC分类号： G01B13/08

CPC分类号： G01B13/04

摘要： A system and method that use a fluid gauge proximity sensor. A source of modulated unidirectional or alternating fluid flow travels along at least one path having a nozzle and a flow or pressure sensor. The fluid exists at a gap between the nozzle and a target. The sensor outputs an amplitude modulated signal that varies according to a size of the gap. The amplitude modulated signal is processed either digitally or in analog devices, which can include being filtered (e.g., band pass, band limited, high pass, etc. filter) to include the modulated frequency and sufficient bandwidth on either side of that frequency and/or being demodulated using a demodulator operating at the acoustical driver modulation frequency. Using this system and method can result in only ambient acoustical energy in a desired frequency range of the device actually having the opportunity to interfere with the device operation. This can lower the devices overall sensitivity to external acoustical noise and sensor offset.

摘要翻译： 使用流量计接近传感器的系统和方法。 调制的单向或交替流体流的源沿着具有喷嘴和流量或压力传感器的至少一个路径行进。 流体存在于喷嘴和靶之间的间隙处。 传感器输出根据间隙大小而变化的幅度调制信号。 幅度调制信号以数字方式或在模拟设备中进行处理，其可以包括被滤波（例如，带通，频带限制，高通等等滤波器）以包括在该频率的任一侧上的调制频率和足够的带宽， 或者使用以声驱动器调制频率工作的解调器进行解调。 使用该系统和方法可以仅使设备的期望频率范围内的环境声能实际上具有干扰设备操作的机会。 这可以降低设备对外部声学噪声和传感器偏移的总体灵敏度。

公开(公告)号：US5187543A

公开(公告)日：1993-02-16

申请号：US467652

申请日：1990-01-19

申请人： Earl W. Ebert

发明人： Earl W. Ebert

IPC分类号： G01B9/02 ,  G01D5/26

CPC分类号： G01B9/02016 ,  G01B9/02057 ,  G01D5/266 ,  G01B2290/70

摘要： A linear displacement interferometer system employs glass wedge prisms (71, 73, 75, 76) diposed about the interferometer axis of symmetry to refract the beams (51A, 55A) produced by the interferometer onto a single area (72, 86) approximately the size of the interferometer beam. If only one spot is produced on each of the stage and reference mirrors (72, 86), then any ambiguity concerning the beams (51B, 55B) is eliminated. In the preferred system, the stage (72) and standard (86) mirrors are located where the refracted beam crosses an interferometer axis of symmetry (80).

摘要翻译： 线性位移干涉仪系统使用围绕干涉仪对称轴倾斜的玻璃楔形棱镜（71,73,75,76）将由干涉仪产生的光束（51A，55A）折射到大致尺寸的单个区域（72,86）上 的干涉仪光束。 如果在每个平台和参考反射镜（72,86）上只产生一个点，则消除关于光束（51B，55B）的任何歧义。 在优选的系统中，阶段（72）和标准（86）反射镜位于折射光束穿过干涉仪对称轴（80）的位置。

公开(公告)号：USRE42650E1

公开(公告)日：2011-08-30

申请号：US11831558

申请日：2007-07-31

申请人： Daniel N. Galburt ,  Earl W. Ebert ,  Joseph H. Lyons

发明人： Daniel N. Galburt ,  Earl W. Ebert ,  Joseph H. Lyons

IPC分类号： G01B13/08

CPC分类号： G01B13/04

摘要： A system and method that use a fluid gauge proximity sensor. A source of modulated unidirectional or alternating fluid flow travels along at least one path having a nozzle and a flow or pressure sensor. The fluid exists at a gap between the nozzle and a target. The sensor outputs an amplitude modulated signal that varies according to a size of the gap. The amplitude modulated signal is processed either digitally or in analog devices, which can include being filtered (e.g., band pass, band limited, high pass, etc. filter) to include the modulated frequency and sufficient bandwidth on either side of that frequency and/or being demodulated using a demodulator operating at the acoustical driver modulation frequency. Using this system and method can result in only ambient acoustical energy in a desired frequency range of the device actually having the opportunity to interfere with the device operation. This can lower the devices overall sensitivity to external acoustical noise and sensor offset.

摘要翻译： 使用流量计接近传感器的系统和方法。 调制的单向或交替流体流的源沿着具有喷嘴和流量或压力传感器的至少一个路径行进。 流体存在于喷嘴和靶之间的间隙处。 传感器输出根据间隙大小而变化的幅度调制信号。 幅度调制信号以数字方式或在模拟设备中进行处理，其可以包括被滤波（例如，带通，频带限制，高通等等滤波器）以包括在该频率的任一侧上的调制频率和足够的带宽， 或者使用以声驱动器调制频率工作的解调器进行解调。 使用该系统和方法可以仅使设备的期望频率范围内的环境声能实际上具有干扰设备操作的机会。 这可以降低设备对外部声学噪声和传感器偏移的总体灵敏度。

公开(公告)号：US07021121B2

公开(公告)日：2006-04-04

申请号：US10854429

申请日：2004-05-27

申请人： Earl W. Ebert ,  Daniel N. Galburt ,  Joseph H. Lyons

发明人： Earl W. Ebert ,  Daniel N. Galburt ,  Joseph H. Lyons

IPC分类号： G01B13/08

CPC分类号： G01B13/12

摘要： A gas gauge proximity sensor modulates a gas stream that is used to feed reference and measurement air gauges, respectively, in a reference portion proximate a reference surface and a measurement portion proximate a measurement surface. The gas stream can be modulated at a frequency at which there is minimal acoustical interference energy (e.g., minimal noise) in demodulated output signal. The sensor output can be filtered so that a measurement signal includes only the modulated frequency and side bands of that frequency to include the desired response band of the device as a whole. The filtered signal can be demodulated using a demodulator operating at a same frequency as the modulator to produce the demodulated output signal. In this embodiment, substantially only ambient acoustical energy in the band pass region may interfere with the device operation. Alternatively, the modulation can be introduced through the reference portion. A reference nozzle sets up a pressure field with the reference surface. A carrier frequency can be generated by mechanical motion of the reference surface. For example, this motion can be introduced by a mechanism like a piezoelectric device or a voice coil coupled to the reference surface. The modulated gas flow combines with the other gas flows to produce a modulated combined gas flow.

摘要翻译： 气体计量接近传感器调节用于分别在靠近参考表面的参考部分和靠近测量表面的测量部分供给参考和测量气量计的气流。 气体流可以在解调输出信号中具有最小声学干扰能量（例如最小噪声）的频率下进行调制。 可以对传感器输出进行滤波，使得测量信号仅包括该频率的调制频率和边带，以包括整个设备的期望响应频带。 可以使用与调制器工作在相同频率的解调器来解调经滤波的信号，以产生解调的输出信号。 在该实施例中，带通区域中基本上只有环境声能可能会干扰器件操作。 或者，可以通过参考部分引入调制。 参考喷嘴与参考表面建立一个压力场。 可以通过参考表面的机械运动来产生载波频率。 例如，该运动可以通过耦合到参考表面的压电装置或音圈等机构引入。 经调制的气流与其他气流结合以产生调制的组合气流。

公开(公告)号：US5028137A

公开(公告)日：1991-07-02

申请号：US310397

申请日：1989-02-13

申请人： Gary E. Sommargren ,  Earl W. Ebert

发明人： Gary E. Sommargren ,  Earl W. Ebert

IPC分类号： G01B9/02

CPC分类号： G01B9/02019 ,  G01B9/02018 ,  G01B9/02077 ,  G01B2290/70

摘要： An angular displacement interferometer system capable of measuring accurately changes in angular displacement comprises a source (10) of a frequency stabilized input beam with two linear orthogonally polarized components; a tilted parallel plate or shear place (16) with regions of reflection, antireflection, and polarizing coatings for converting the input beam (12) into two separated, parallel, orthogonally polarized beams (30, 31); a half-wave retardation plate (29) located in one of the separated beams (31) for converting the two separated, parallel, orthogonally polarized beams (30, 31); into first and second beams which are spatially separated parallel, and have the same polarization (30, 33); a polarizing beamsplitter (40) and quarter-wave retardation plate (44) for transmitting the first and second beams (34, 35) to a fixed plano mirror (70) nominally perpendicular to the first and second beams for reflecting the first and second beams back into the quarter-wave retardation plate (44), polarizing beamsplitter (40), and retroreflector (48) for producing third and fourth beams (56, 67); a rotatable angle prism (72, 93) attached to the mechanical apparatus whose angular displacement is to be measured, located such that the third and fourth beams enter adjacent polygon faces of prism (72) or legs of prism (93) and are refracted to produce fifth and sixth beams which are reflected from the fixed plano mirror (70) back through the angle prism (72, 93) back through the quarter-wave retardation plate (44), beamsplitter (40), retardation plate (29) and shear plate (16) where the fifth and sixth beams are recombined into a single output beam (80) having two orthogonally polarized components in which the phase difference between the two components of the output beam (80) is related to the angular displacement; a polarizer (81) for mixing the orthogonal components of the output beam (80); a photoelectric detector (83) for producing an electrical measurement signal (85); and a phase meter/accumulator (90) for indicating the measured phase (92), the measured phase being related to the angular displacement.