Invention Application
- Patent Title: AN ARRANGEMENT IN A SEMICONDUCTOR ACCELEROMETER
- Patent Title (中): 半导体加速度计中的安排
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Application No.: PCT/NO1991000008Application Date: 1991-01-24
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Publication No.: WO1991011722A1Publication Date: 1991-08-08
- Inventor: SENSONOR A.S
- Applicant: SENSONOR A.S , JACOBSEN, Henrik , KVISTEROY, Terje
- Assignee: SENSONOR A.S,JACOBSEN, Henrik,KVISTEROY, Terje
- Current Assignee: SENSONOR A.S,JACOBSEN, Henrik,KVISTEROY, Terje
- Priority: NO900329 19900124
- Main IPC: G01P15/09
- IPC: G01P15/09
Abstract:
An arrangement in a semiconductor accelerometer (1), e.g. consisting of etched silicon spring (2) comprising a resistance bridge (3), as well as a weight at the free end portion (2') of the spring, and in which a spring rupture indicator is provided in the shape of a resistance loop (6, 6', 6'') along the spring length.
Information query
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