Invention Application
WO1991011722A1 AN ARRANGEMENT IN A SEMICONDUCTOR ACCELEROMETER 审中-公开
半导体加速度计中的安排

AN ARRANGEMENT IN A SEMICONDUCTOR ACCELEROMETER
Abstract:
An arrangement in a semiconductor accelerometer (1), e.g. consisting of etched silicon spring (2) comprising a resistance bridge (3), as well as a weight at the free end portion (2') of the spring, and in which a spring rupture indicator is provided in the shape of a resistance loop (6, 6', 6'') along the spring length.
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