Invention Application
WO1996015459A1 MOUNTING SPRING ELEMENTS ON SEMICONDUCTOR DEVICES, AND WAFER-LEVEL TESTING METHODOLOGY
审中-公开
半导体器件的安装弹簧元件和水平测试方法
- Patent Title: MOUNTING SPRING ELEMENTS ON SEMICONDUCTOR DEVICES, AND WAFER-LEVEL TESTING METHODOLOGY
- Patent Title (中): 半导体器件的安装弹簧元件和水平测试方法
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Application No.: PCT/US1995014885Application Date: 1995-11-15
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Publication No.: WO1996015459A1Publication Date: 1996-05-23
- Inventor: FORMFACTOR, INC. , KHANDROS, Igor, Y. , MATHIEU, Gaetan, L. , ELDRIDGE, Benjamin, N. , GRUBE, Gary, W.
- Applicant: FORMFACTOR, INC.
- Assignee: FORMFACTOR, INC.
- Current Assignee: FORMFACTOR, INC.
- Priority: US8/340,144 19941115; ATPCT/US94/13373 19941116; US8/452,255 19950526; US8/457,479 19950601; US8/526,246 19950921; US8/533,584 19951018; US951115 19951115
- Main IPC: G01R01/073
- IPC: G01R01/073
Abstract:
Resilient contact structures (430) are mounted directly to bond pads (410) on semiconductor dies (402a, 402b), prior to the dies (402a, 402b) being singulated (separated) from a semiconductor wafer. This enables the semiconductor dies (402a, 402b) to be exercised (e.g., tested and/or burned-in) by connecting to the semiconductor dies (702, 704) with a circuit board (710) or the like having a plurality of terminals (712) disposed on a surface thereof. Subsequently, the semiconductor dies (402a, 402b) may be singulated from the semiconductor wafer, whereupon the same resilient contact structures (430) can be used to effect interconnections between the semiconductor dies and other electronic components (such as wiring substrates, semiconductor packages, etc.). Using the all-metallic composite interconnection elements (430) of the present invention as the resilient contact structures, burn-in (792) can be performed at temperatures of at least 150 DEG C, and can be completed in less than 60 minutes.
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