Invention Application
WO1997034197A1 RESIN COMPOSITIONS FOR PHOTORESIST APPLICATIONS 审中-公开
用于光电子应用的树脂组合物

RESIN COMPOSITIONS FOR PHOTORESIST APPLICATIONS
Abstract:
The invention relates to the use of a mixture of film forming water-insoluble and alkali-soluble novolak resin and thermally stable, alkali-soluble and water-insoluble polyalkylated resin in photosensitive compositions where the polyalkylated resin is a reaction product of a carboxylic acid and at least one substituted phenyl carbinol. The present invention also relates to a method for producing a semiconductor device by coating, imaging and developing the photosensitive composition containing a mixture of novolak resin and the polyalkylated resin of this invention.
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