Invention Application
- Patent Title: RESIN COMPOSITIONS FOR PHOTORESIST APPLICATIONS
- Patent Title (中): 用于光电子应用的树脂组合物
-
Application No.: PCT/US1996008202Application Date: 1996-05-31
-
Publication No.: WO1997034197A1Publication Date: 1997-09-18
- Inventor: HOECHST CELANESE CORPORATION , LU, Ping-Hung , KOKINDA, Elaine, G. , RAHMAN, M., Dalil , DAMMEL, Ralph, R. , VICARI, Richard , SOUNIK, James, R. , FICNER, Stanley, A.
- Applicant: HOECHST CELANESE CORPORATION
- Assignee: HOECHST CELANESE CORPORATION
- Current Assignee: HOECHST CELANESE CORPORATION
- Priority: US60/013,226 19960311
- Main IPC: G03F07/023
- IPC: G03F07/023
Abstract:
The invention relates to the use of a mixture of film forming water-insoluble and alkali-soluble novolak resin and thermally stable, alkali-soluble and water-insoluble polyalkylated resin in photosensitive compositions where the polyalkylated resin is a reaction product of a carboxylic acid and at least one substituted phenyl carbinol. The present invention also relates to a method for producing a semiconductor device by coating, imaging and developing the photosensitive composition containing a mixture of novolak resin and the polyalkylated resin of this invention.
Information query