Invention Application
WO1998008651A1 DEVICE FOR CONDITIONING POLISHING PADS UTILIZING BRAZED CUBIC BORON NITRIDE TECHNOLOGY
审中-公开
用于调节抛光立方氮化硼技术的抛光垫的装置
- Patent Title: DEVICE FOR CONDITIONING POLISHING PADS UTILIZING BRAZED CUBIC BORON NITRIDE TECHNOLOGY
- Patent Title (中): 用于调节抛光立方氮化硼技术的抛光垫的装置
-
Application No.: PCT/US1997015380Application Date: 1997-08-28
-
Publication No.: WO1998008651A1Publication Date: 1998-03-05
- Inventor: SPEEDFAM CORPORATION , HOLZAPFEL, Paul
- Applicant: SPEEDFAM CORPORATION
- Assignee: SPEEDFAM CORPORATION
- Current Assignee: SPEEDFAM CORPORATION
- Priority: US8/704,088 19960828
- Main IPC: B24B37/04
- IPC: B24B37/04
Abstract:
A conditioning device having (200) cubic boron nitride cutting elements (205) brazed-bonded to the bottom surface of the device and suitably adopted for conditioning a workpiece polishing pad by moving across the pad while in contact with the pad. The conditioning device (200) may further include a flange (202) extending about the bottom periphery of the device (200) with the cubic boron nitride cutting elements (205) being attached to the bottom surface of the flange (202). The flange (202) may include cutout portions for permitting material to escape from the interior of the device (200). The cubic boron nitride cutting elements (205) are distributed substantially uniformly across the bottom surface of the flange (202) and the elements are brazed-bonded to the flange with a braised metal alloy, creating an extremely strong bond between the cutting elements (205) and the flange (202) surface. Further, the conditioning ring may be attached to a plurality of wafer carrier elements (124) so that the conditioning process occurs during the actual polishing of the wafers (101), or the conditioning ring may be attached to a mechanical arm which engages the ring against the polishing pad between wafer polishing steps. In either case, to enhance the conditioning process, the carrier element and/or the mechanical arm suitably rotates the conditioning ring about its axis and oscillates the ring back and forth across the polishing pad.
Information query