Invention Application
WO01038835A1 METHOD FOR CONTROLLING AN AMOUNT OF MATERIAL DELIVERED DURING A MATERIAL TRANSFER
审中-公开
用于控制在材料转移期间交付的材料量的方法
- Patent Title: METHOD FOR CONTROLLING AN AMOUNT OF MATERIAL DELIVERED DURING A MATERIAL TRANSFER
- Patent Title (中): 用于控制在材料转移期间交付的材料量的方法
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Application No.: PCT/US2000/032202Application Date: 2000-11-22
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Publication No.: WO01038835A1Publication Date: 2001-05-31
- Main IPC: G01G13/04
- IPC: G01G13/04 ; G01G13/12 ; G01G13/285 ; G05D7/06
Abstract:
A method for controlling an amount of material delivered during a material transfer. This method includes the steps of inputting a target amount for a material to be delivered from a source location to a target location, updating the target amount during the delivery of the material using a predictive model-based algorithm, and updating the predictive model-based algorithm based on process performance data using a recursive least-squares procedure. An adaptive selection algorithm which is used to determine whether at least one previous predictive model-based algorithm parameter should be replaced with at least one new predictive model-based algorithm parameter in order to adapt the predictive model-based algorithm in response to a process change. A method for overlapping a delivery of at least one independently measured material with a delivery of a main material during a material transfer process.
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