Invention Application
WO0173934A3 MULTI-LAYER, SELF-ALIGNED VERTICAL COMB-DRIVE ELECTROSTATIC ACTUATORS AND FABRICATION METHODS
审中-公开
多层,自对准垂直组合式静电激励器和制造方法
- Patent Title: MULTI-LAYER, SELF-ALIGNED VERTICAL COMB-DRIVE ELECTROSTATIC ACTUATORS AND FABRICATION METHODS
- Patent Title (中): 多层,自对准垂直组合式静电激励器和制造方法
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Application No.: PCT/US0109462Application Date: 2001-03-23
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Publication No.: WO0173934A3Publication Date: 2002-03-14
- Inventor: BEHIN BEHRANG , PANNU SATINDERPALL S
- Applicant: ONIX MICROSYSTEMS INC
- Assignee: ONIX MICROSYSTEMS INC
- Current Assignee: ONIX MICROSYSTEMS INC
- Priority: US19209700 2000-03-24
- Main IPC: B81B5/00
- IPC: B81B5/00 ; B81B3/00 ; B81C99/00 ; G02B6/35 ; G02B26/08 ; H02N1/00
Abstract:
A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers (14) and a second comb structure having a plurality of second comb fingers (24), wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage (15) between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axes.
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