APPARATUS AND PACKAGING METHOD TO ASSEMBLE OPTICAL MODULES TO A COMMON SUBSTRATE WITH ADJUSTABLE PLUGS
    1.
    发明申请
    APPARATUS AND PACKAGING METHOD TO ASSEMBLE OPTICAL MODULES TO A COMMON SUBSTRATE WITH ADJUSTABLE PLUGS 审中-公开
    将光学模块装配到具有可调节插头的通用基板的装置和封装方法

    公开(公告)号:WO0165294A3

    公开(公告)日:2002-03-07

    申请号:PCT/US0106659

    申请日:2001-02-28

    Inventor: CHAU KELVIN

    Abstract: For any optically interconnected assembly, the packaging tasks include alignment of one or multiple optical devices (712), and attachement of aligned modules to a common substrate (702). The concept disclosed here is a packaging method to assemble pre-aligned optical modules (712) on a common structure called motherboard (702). The apparatus consists of two components: device carrier (704) or motherboard (702) with openings on the sides and adjustable plugs (706) in the form of pins or balls. The method and apparatus utilize plugs (706) as connection bridges between device carriers (704) and motherboard (702), allowing solid contacts and a rigid aligned structure among modules (712). The direct benefits include relaxation of dimensional tolerances on parts and elimination of the need for high-precision spacers.

    Abstract translation: 对于任何光学互连组件,包装任务包括一个或多个光学装置(712)的对准,以及将对齐的模块附着到公共衬底(702)。 这里公开的概念是将预定对准的光学模块(712)组装在称为主板(702)的公共结构上的封装方法。 该装置由两部分组成:装置载体(704)或在侧面具有开口的主板(702)和以销或球形式的可调塞(706)。 该方法和装置利用插头(706)作为装置载体(704)和母板(702)之间的连接桥,允许模块之间的固体触点和刚性对准结构(712)。 直接的优点包括放宽零件的尺寸公差,消除对高精度垫片的需求。

    CAPACITIVE SENSING SCHEME FOR DIGITAL CONTROL STATE DETECTION IN OPTICAL SWITCHES
    2.
    发明申请
    CAPACITIVE SENSING SCHEME FOR DIGITAL CONTROL STATE DETECTION IN OPTICAL SWITCHES 审中-公开
    用于数字控制状态检测光电开关的电容感测方案

    公开(公告)号:WO0177735A3

    公开(公告)日:2002-05-16

    申请号:PCT/US0111047

    申请日:2001-04-04

    CPC classification number: G02B6/358 G02B6/3512 G02B6/3546 G02B6/357 G02B6/359

    Abstract: Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the "on" or "off" position. Embodiments of the invention have application in devices switches that employ mirrors that move between an "on" or "off" position, wherein they reflect light from an input fiber into an output fiber in the "on" position, and allow the light to pass in the "off" position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the "on" or "off" position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more positions in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.

    Abstract translation: 公开了一种用于检测可旋转MEMS元件是处于“开”还是“关”位置的装置和方法。 本发明的实施例可应用于使用在“开”或“关”位置之间移动的反射镜的装置开关中,其中它们将来自输入光纤的光反射到处于“开”位置的输出光纤,并允许光通过 在“关”位置。 电极被定位在设备中,使得反射镜接近并由此电容耦合到不同的电极,这取决于它们是处于“开”还是“关”位置。 本发明对于已经使用用于在一个或多个位置中的反射镜的静电夹持的电极的开关特别有用,因为这些相同的电极可以用于静电夹紧反射镜并感测其位置。 本发明描述的方法包括感测反射镜之间的电容和用于将反射镜夹持在其一个或多个位置中的一个或多个电极,以便检测反射镜被夹住的位置。此外, 可以监控电容以检测不正确的夹紧。

    OPTICAL SWITCH HAVING EQUALIZED BEAM SPREADING IN ALL CONNECTIONS
    3.
    发明申请
    OPTICAL SWITCH HAVING EQUALIZED BEAM SPREADING IN ALL CONNECTIONS 审中-公开
    具有均衡梁的光学开关在所有连接中传播

    公开(公告)号:WO0165300A3

    公开(公告)日:2003-01-16

    申请号:PCT/US0106961

    申请日:2001-03-02

    CPC classification number: G02B6/3582 G02B6/3512 G02B6/3546

    Abstract: An optical crossbar switch having refractive or reflective components for equalizing beam spreading and diffraction in all the connections. The optical fibers or waveguides coupled to the switch are not staggered, but are parallel as in a conventional fiber array. The refractive component is disposed between the switch and the input optical fibers. Preferably, a similar refractive component is disposed between the output optical fibers and the switch. The refractive component can be a stairstep block made of glass, silicon or silica. Light from each input fiber travels through a well-defined thickness of the stairstep block. Since the block has a refractive index greater than the surrounding atmosphere, the wavelength is reduced within the block, and beam spreading and diffraction are reduced. For switch connections that have a long optical path, a long optical path through the block is required. The dimensions of the block must be designed according to the path length differences of the different switch connections. Optionally, a prism is used instead of the stairstep block. In this case, the optical fibers must be aligned at an angle to the switch. Furthermore, a series of small optical deflectors can be used instead of the stairstep structure.

    Abstract translation: 具有用于均衡所有连接中的光束扩散和衍射的折射或反射分量的光学交叉开关。 耦合到开关的光纤或波导不是交错的,而是像传统的光纤阵列那样平行。 折射分量设置在开关和输入光纤之间。 优选地,在输出光纤和开关之间设置类似的折射分量。 折射分量可以是由玻璃,硅或二氧化硅制成的稳态块。 来自每个输入光纤的光线穿过明显的厚度的步态块。 由于该块具有大于周围大气的折射率,所以在该块内波长减小,并且光束扩散和衍射减小。 对于具有长光路的开关连接,需要通过该块的长光路。 块的尺寸必须根据不同开关连接的路径长度差设计。 可选地,使用棱镜代替步骤块。 在这种情况下,光纤必须与开关成一定角度对齐。 此外,可以使用一系列小的光学偏转器来代替稳态结构。

    BIASED ROTATABLE COMBDRIVE DEVICES AND METHODS
    4.
    发明申请
    BIASED ROTATABLE COMBDRIVE DEVICES AND METHODS 审中-公开
    可弯曲的可旋转装置和方法

    公开(公告)号:WO0173936A3

    公开(公告)日:2002-04-18

    申请号:PCT/US0109554

    申请日:2001-03-23

    Abstract: Rotating devices including actuators and position sensors that employ combdrives are described. One design of a combdrive fabricated from a single layer is provided such that, in a nominal state, the two sets of comb fingers (702, 712) are substantially interdigitated according to a predetermined engagement. A rotating element (700) may be attached to a rotatable flexure (711) disposed along an axis and coupled to the comb fingers along with a biasing element attached to the rotating element to cause the comb fingers along with the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback (780) from sensing the position of the movable or rotating element. A voltage may be applied between comb fingers to cause the rotating element to undergo further rotation about the axis in a predetermined manner. Alternatively, a time-vary biasing force may be exerted on the rotating element, causing the first comb fingers along with the rotating element to undergo further rotation about the axis in a predetermined manner. The combdriven device can serve as both rotating actuators and position sensor. By arranging two such combdrives in a gimballed structure bi-axial rotating actuators and position sensors may be constructed. The combdrive devices of the present invention can be employed in a broad range of applications, including biomedical services, optical devices for tracking and display, telecommunication devices such as fiber-optic switches, inertial sensors, and magnetic disk drives.

    Abstract translation: 描述了包括使用梳齿的致动器和位置传感器的旋转装置。 提供由单层制造的梳齿驱动器的一个设计,使得在标称状态下,两组梳指(702,712)根据预定的接合基本上是交错的。 旋转元件(700)可以附接到沿着轴线设置的可旋转的弯曲部(711),并且与附接到旋转元件的偏置元件一起耦合到梳齿,以使梳齿与旋转元件一起受到控制 来自初始接合的角位移和响应于来自感测可移动或旋转元件的位置的反馈(780)。 可以在梳齿之间施加电压,使得旋转元件以预定的方式围绕轴进行进一步的旋转。 或者,可以在旋转元件上施加时变偏压力,使得第一梳指与旋转元件一起以预定方式围绕轴进一步旋转。 梳齿装置可用作旋转执行器和位置传感器。 通过将两个这样的梳齿机布置在结构结构中,可以构造双轴旋转致动器和位置传感器。 本发明的梳状驱动装置可以用于广泛的应用,包括生物医学服务,用于跟踪和显示的光学装置,诸如光纤开关,惯性传感器和磁盘驱动器之类的电信设备。

    BIASED ROTATABLE COMB DRIVE SENSOR METHODS
    6.
    发明申请
    BIASED ROTATABLE COMB DRIVE SENSOR METHODS 审中-公开
    可弯曲的传动传感器方法

    公开(公告)号:WO0176054A3

    公开(公告)日:2002-04-18

    申请号:PCT/US0109260

    申请日:2001-03-22

    Abstract: A method for rotating a combdriven device uses application of bias force to controllably rotate the device about one or two axis in response to position measurements of the rotating element. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.

    Abstract translation: 用于旋转梳齿装置的方法使用偏置力的应用来响应于旋转元件的位置测量来围绕一个或两个轴线可控地旋转装置。 本发明可以用于现有技术的交错梳状驱动器,单层自对准梳状驱动装置,以及在光通信切换,视频,生物医学,惯性传感器和存储磁盘驱动器中的广泛应用中。

    MULTI-LAYER, SELF-ALIGNED VERTICAL COMB-DRIVE ELECTROSTATIC ACTUATORS AND FABRICATION METHODS

    公开(公告)号:WO2001074707A3

    公开(公告)日:2001-10-11

    申请号:PCT/US2001/009261

    申请日:2001-03-22

    Abstract: A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers (115) and a second comb structure having a plurality of second comb fingers (117), wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first (115) and second (117) comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.

    OPTICAL SWITCH EMPLOYING BIASED ROTATABLE COMB DRIVE DEVICES AND METHODS
    9.
    发明申请
    OPTICAL SWITCH EMPLOYING BIASED ROTATABLE COMB DRIVE DEVICES AND METHODS 审中-公开
    光学开关使用偏心可旋转组合驱动装置和方法

    公开(公告)号:WO0173935A3

    公开(公告)日:2002-04-18

    申请号:PCT/US0109553

    申请日:2001-03-23

    Abstract: Optical switches based on combdriven MEMs rotating devices (700) including actuators and position sensors. The present invention includes an embodiment that uses rotating elements attached to rotatable flexure (711) disposed along an axis and coupled to the comb fingers (702, 712) with a biasing element coupled to the rotating element causing the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback (780) from sensing the position of the movable or rotating element (720). A voltage applied between comb fingers may cause the rotating element to undergo further rotation about the axis in a predetermined manner to deflect and switch an optical signal. The switches of the present invention can be employed with prior-art staggered combdrives and single layer self-aligned combdriven devices.

    Abstract translation: 基于梳状MEMs旋转装置(700)的光学开关,包括致动器和位置传感器。 本发明包括一个实施例,其使用连接到沿轴线设置的旋转挠曲件(711)的旋转元件,并且与旋转元件连接的偏置元件(702,712)连接到梳齿(702,712),使得旋转元件经受受控角度 从初始接合的位移和响应于感测可移动或旋转元件(720)的位置的反馈(780)。 施加在梳齿之间的电压可能导致旋转元件以预定方式围绕轴进行进一步旋转以偏转和切换光信号。 本发明的开关可以与现有技术的交错梳齿驱动器和单层自对准梳齿装置一起使用。

    BIASED ROTATABLE COMB DRIVE ACTUATOR METHODS
    10.
    发明申请
    BIASED ROTATABLE COMB DRIVE ACTUATOR METHODS 审中-公开
    双向可旋转组合驱动器方法

    公开(公告)号:WO0176055A3

    公开(公告)日:2002-03-07

    申请号:PCT/US0109533

    申请日:2001-03-23

    Abstract: A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first (712) and second (702) comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback (780) to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.

    Abstract translation: 围绕轴线旋转梳齿驱动装置的方法使用施加的偏压力以及第一(712)和第二(702)梳齿之间的施加电压,以围绕一个或两个轴线可控地旋转该装置。 本发明的一个模式包括测量旋转元件的位置并通过改变偏压力和/或驱动电压来提供反馈(780)来控制其角位置。 本发明可以用于现有技术的交错梳状驱动器,单层自对准梳状驱动装置,以及在光通信切换,视频,生物医学,惯性传感器和存储磁盘驱动器中的广泛应用中。

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