Abstract:
For any optically interconnected assembly, the packaging tasks include alignment of one or multiple optical devices (712), and attachement of aligned modules to a common substrate (702). The concept disclosed here is a packaging method to assemble pre-aligned optical modules (712) on a common structure called motherboard (702). The apparatus consists of two components: device carrier (704) or motherboard (702) with openings on the sides and adjustable plugs (706) in the form of pins or balls. The method and apparatus utilize plugs (706) as connection bridges between device carriers (704) and motherboard (702), allowing solid contacts and a rigid aligned structure among modules (712). The direct benefits include relaxation of dimensional tolerances on parts and elimination of the need for high-precision spacers.
Abstract:
Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the "on" or "off" position. Embodiments of the invention have application in devices switches that employ mirrors that move between an "on" or "off" position, wherein they reflect light from an input fiber into an output fiber in the "on" position, and allow the light to pass in the "off" position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the "on" or "off" position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more positions in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.
Abstract:
An optical crossbar switch having refractive or reflective components for equalizing beam spreading and diffraction in all the connections. The optical fibers or waveguides coupled to the switch are not staggered, but are parallel as in a conventional fiber array. The refractive component is disposed between the switch and the input optical fibers. Preferably, a similar refractive component is disposed between the output optical fibers and the switch. The refractive component can be a stairstep block made of glass, silicon or silica. Light from each input fiber travels through a well-defined thickness of the stairstep block. Since the block has a refractive index greater than the surrounding atmosphere, the wavelength is reduced within the block, and beam spreading and diffraction are reduced. For switch connections that have a long optical path, a long optical path through the block is required. The dimensions of the block must be designed according to the path length differences of the different switch connections. Optionally, a prism is used instead of the stairstep block. In this case, the optical fibers must be aligned at an angle to the switch. Furthermore, a series of small optical deflectors can be used instead of the stairstep structure.
Abstract:
Rotating devices including actuators and position sensors that employ combdrives are described. One design of a combdrive fabricated from a single layer is provided such that, in a nominal state, the two sets of comb fingers (702, 712) are substantially interdigitated according to a predetermined engagement. A rotating element (700) may be attached to a rotatable flexure (711) disposed along an axis and coupled to the comb fingers along with a biasing element attached to the rotating element to cause the comb fingers along with the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback (780) from sensing the position of the movable or rotating element. A voltage may be applied between comb fingers to cause the rotating element to undergo further rotation about the axis in a predetermined manner. Alternatively, a time-vary biasing force may be exerted on the rotating element, causing the first comb fingers along with the rotating element to undergo further rotation about the axis in a predetermined manner. The combdriven device can serve as both rotating actuators and position sensor. By arranging two such combdrives in a gimballed structure bi-axial rotating actuators and position sensors may be constructed. The combdrive devices of the present invention can be employed in a broad range of applications, including biomedical services, optical devices for tracking and display, telecommunication devices such as fiber-optic switches, inertial sensors, and magnetic disk drives.
Abstract:
A beam steering module and switching system. The steering module is composed of an NxM array of single axis mirrors able to rotate about a particular axis (X-axis), a second NxM array of single axis mirrors able to rotate about an axis orthogonal to that of the first NxM array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.
Abstract:
A method for rotating a combdriven device uses application of bias force to controllably rotate the device about one or two axis in response to position measurements of the rotating element. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.
Abstract:
A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers (14) and a second comb structure having a plurality of second comb fingers (24), wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage (15) between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axes.
Abstract:
A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers (115) and a second comb structure having a plurality of second comb fingers (117), wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first (115) and second (117) comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.
Abstract:
Optical switches based on combdriven MEMs rotating devices (700) including actuators and position sensors. The present invention includes an embodiment that uses rotating elements attached to rotatable flexure (711) disposed along an axis and coupled to the comb fingers (702, 712) with a biasing element coupled to the rotating element causing the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback (780) from sensing the position of the movable or rotating element (720). A voltage applied between comb fingers may cause the rotating element to undergo further rotation about the axis in a predetermined manner to deflect and switch an optical signal. The switches of the present invention can be employed with prior-art staggered combdrives and single layer self-aligned combdriven devices.
Abstract:
A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first (712) and second (702) comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback (780) to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.