Invention Application
- Patent Title: BIASED ROTATABLE COMB DRIVE ACTUATOR METHODS
- Patent Title (中): 双向可旋转组合驱动器方法
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Application No.: PCT/US0109533Application Date: 2001-03-23
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Publication No.: WO0176055A3Publication Date: 2002-03-07
- Inventor: BEHIN BEHRANG , PANNU SATINDERPALL S
- Applicant: ONIX MICROSYSTEMS INC
- Assignee: ONIX MICROSYSTEMS INC
- Current Assignee: ONIX MICROSYSTEMS INC
- Priority: US19185600 2000-03-24
- Main IPC: G02B6/35
- IPC: G02B6/35 ; G02B26/08 ; H02N1/00
Abstract:
A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first (712) and second (702) comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback (780) to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.
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