Invention Application
WO0177735A3 CAPACITIVE SENSING SCHEME FOR DIGITAL CONTROL STATE DETECTION IN OPTICAL SWITCHES
审中-公开
用于数字控制状态检测光电开关的电容感测方案
- Patent Title: CAPACITIVE SENSING SCHEME FOR DIGITAL CONTROL STATE DETECTION IN OPTICAL SWITCHES
- Patent Title (中): 用于数字控制状态检测光电开关的电容感测方案
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Application No.: PCT/US0111047Application Date: 2001-04-04
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Publication No.: WO0177735A3Publication Date: 2002-05-16
- Inventor: BEHIN BEHRANG , DANEMAN MICHAEL J , KIANG MENG-HSIUNG , LAU KAM-YIN , BEERLING TIMOTHY J
- Applicant: ONIX MICROSYSTEMS INC
- Assignee: ONIX MICROSYSTEMS INC
- Current Assignee: ONIX MICROSYSTEMS INC
- Priority: US19605500 2000-04-10; US72494800 2000-11-28
- Main IPC: G02B6/35
- IPC: G02B6/35 ; G02B26/02 ; G02B26/08
Abstract:
Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the "on" or "off" position. Embodiments of the invention have application in devices switches that employ mirrors that move between an "on" or "off" position, wherein they reflect light from an input fiber into an output fiber in the "on" position, and allow the light to pass in the "off" position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the "on" or "off" position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more positions in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.
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