Invention Application
WO02050910A1 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE IDENTIFYING METHOD, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE PRODUCING METHOD, AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE 审中-公开
半导体集成电路装置识别方法,半导体集成电路装置的制造方法和半导体集成电路装置

  • Patent Title: SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE IDENTIFYING METHOD, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE PRODUCING METHOD, AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
  • Patent Title (English): Semiconductor integrated circuit device identifying method, semiconductor integrated circuit device producing method, and semiconductor integrated circuit device
  • Patent Title (中): 半导体集成电路装置识别方法,半导体集成电路装置的制造方法和半导体集成电路装置
  • Application No.: PCT/JP2000/008500
    Application Date: 2000-12-01
  • Publication No.: WO02050910A1
    Publication Date: 2002-06-27
  • Main IPC: G06K19/06
  • IPC: G06K19/06 H01L21/66 H01L23/544 H01L27/04 G01R31/28
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE IDENTIFYING METHOD, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE PRODUCING METHOD, AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
Abstract:
A semiconductor integrated circuit device identifying method, wherein a plurality of identifying elements having the same form are formed in the process of production of semiconductor integrated circuit devices, the identifying elements being used as identifying information intrinsic in the semiconductor integrated circuit devices on the basis of the magnitude relation between physical values corresponding to process variations in the plurality of identifying elements.
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