Invention Application
- Patent Title: PROJECTION LENS
- Patent Title (中): 投影镜头
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Application No.: PCT/EP0114846Application Date: 2001-12-15
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Publication No.: WO02052303A2Publication Date: 2002-07-04
- Inventor: SCHUSTER KARL-HEINZ
- Applicant: ZEISS CARL SEMICONDUCTOR MFG , SCHUSTER KARL-HEINZ
- Assignee: ZEISS CARL SEMICONDUCTOR MFG,SCHUSTER KARL-HEINZ
- Current Assignee: ZEISS CARL SEMICONDUCTOR MFG,SCHUSTER KARL-HEINZ
- Priority: DE10065944 2000-12-22; DE10126946 2001-06-01
- Main IPC: G02B13/24
- IPC: G02B13/24 ; G02B13/14 ; G02B13/18 ; G02B13/22 ; G03F7/20 ; H01L21/027 ; G02B
Abstract:
The invention relates to a projection illumination system and a projection lens comprising a lens arrangement consisting of at least one group of negative refractive lenses (LG2). Said lens group is comprised of at least 4 negative refractive lenses. A positive refractive lens (L9) is arranged in said lens group (LG2) after the third negative refractive lens (L8).
Information query
