Invention Application
- Patent Title: CAPACITY COUPLED RF VOLTAGE PROBE
- Patent Title (中): 容量耦合射频电压探头
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Application No.: PCT/US0147488Application Date: 2001-12-17
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Publication No.: WO02054091A3Publication Date: 2002-11-21
- Inventor: JEVTIC JOHAN , MITROVIC S ANDREJ
- Applicant: TOKYO ELECTRON LTD , JEVTIC JOHAN , MITROVIC S ANDREJ
- Assignee: TOKYO ELECTRON LTD,JEVTIC JOHAN,MITROVIC S ANDREJ
- Current Assignee: TOKYO ELECTRON LTD,JEVTIC JOHAN,MITROVIC S ANDREJ
- Priority: US25986201 2001-01-08
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R1/07 ; G01R1/24 ; G01R15/16 ; G01R19/28
Abstract:
A voltage probe including a transmission line having an inner conductor and an outer conductor. An electrode is spaced apart from the outer conductor. A dielectric is disposed between the electrode and the outer cnductor, adjacent an inner surface of the outer conductor. An exemplary method of implementing the voltage probe may include providing the dielectric adjacent the outer conductor. The electrode separated from the outer conductor by the dielectric and positioned adjacent to the dielectric is provided. A signal is measured from the electrode indicating a transmission voltage in the transmission line.
Public/Granted literature
- WO02054091A8 CAPACITY COUPLED RF VOLTAGE PROBE Public/Granted day:2003-02-20
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