Invention Application
WO2002086187A1 APPARATUS FOR THE DEPOSITION OF METAL OR METAL OXIDE COATINGS
审中-公开
用于金属或金属氧化物涂层沉积的装置
- Patent Title: APPARATUS FOR THE DEPOSITION OF METAL OR METAL OXIDE COATINGS
- Patent Title (中): 用于金属或金属氧化物涂层沉积的装置
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Application No.: PCT/EP2002/004243Application Date: 2002-04-17
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Publication No.: WO2002086187A1Publication Date: 2002-10-31
- Inventor: DENUL, Jurgen , DE GRYSE, Roger , SEGERS, Anneke , LIEVENS, Hugo
- Applicant: N.V. BEKAERT S.A. , DENUL, Jurgen , DE GRYSE, Roger , SEGERS, Anneke , LIEVENS, Hugo
- Applicant Address: Bekaertstraat 2, B-8550 Zwevegem BE
- Assignee: N.V. BEKAERT S.A.,DENUL, Jurgen,DE GRYSE, Roger,SEGERS, Anneke,LIEVENS, Hugo
- Current Assignee: N.V. BEKAERT S.A.,DENUL, Jurgen,DE GRYSE, Roger,SEGERS, Anneke,LIEVENS, Hugo
- Current Assignee Address: Bekaertstraat 2, B-8550 Zwevegem BE
- Priority: EP01201428.8 20010420
- Main IPC: C23C14/50
- IPC: C23C14/50
Abstract:
The invention relates to an apparatus for the deposition of a metal or a metal oxide coating on a substrate. The apparatus comprises a holding system for at least one substrate and a housing surrounding the holding system and provided with a heating system. The holding system is mounted in such a way that it can be rotated inside the housing. The apparatus is in particular suitable to deposit superconducting metal oxide coatings.
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