Invention Application
WO2002086188A1 APPARATUS AND METHOD FOR THE DEPOSITION OF METAL OR METAL OXIDE COATINGS ON AN ELONGATED SUBSTRATE 审中-公开
金属或金属氧化物涂层在延长基底上沉积的装置和方法

APPARATUS AND METHOD FOR THE DEPOSITION OF METAL OR METAL OXIDE COATINGS ON AN ELONGATED SUBSTRATE
Abstract:
The invention relates to an apparatus and a method for the deposition of a metal or a metal oxide coating on an elongated substrate. The apparatus comprises a winding system holding an elongated substrate and a housing surrounding the winding system and provided with a heating system. The winding system holding the elongated substrate is mounted in such a way that it can be rotated inside the housing.The apparatus is in particular suitable to deposit superconducting metal oxide coatings.
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