Invention Application
- Patent Title: REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT
- Patent Title (中): 增强化学机械平面化皮带
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Application No.: PCT/US2003/007389Application Date: 2003-03-10
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Publication No.: WO2003078859A2Publication Date: 2003-09-25
- Inventor: LIN, Jibing , HYMES, Diane, J.
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: 4650 Cushing Parkway, Fremont, CA 94538 US
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: 4650 Cushing Parkway, Fremont, CA 94538 US
- Agency: VON WOHLD, Rick
- Priority: US10/097,337 20020312; US10/112,447 20020329
- Main IPC: F16G
- IPC: F16G
Abstract:
A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt.
Public/Granted literature
- WO2003078859A3 REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT Public/Granted day:2003-09-25
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