公开(公告)号：WO2006065532A2

公开(公告)日：2006-06-22

申请号：PCT/US2005/043256

申请日：2005-11-29

Applicant: LAM RESEARCH CORPORATION ,  MOORING, Ben ,  PARKS, John ,  HYMES, Diane, J.

Inventor： MOORING, Ben ,  PARKS, John ,  HYMES, Diane, J.

IPC: C23C16/00

CPC classification number: H01L21/67109

Abstract: In one of the many embodiments, an apparatus for processing a substrate is provided which includes a substrate processing chamber where the substrate is positioned within the substrate processing chamber so the substrate at least partially separates the substrate processing chamber into a first chamber and a second chamber. The apparatus further includes a first chamber inlet configured to input a first fluid of a first temperature into the first chamber at a first pressure and a second chamber inlet configured to input a second fluid of a second temperature into the second chamber at a second pressure wherein the first pressure and the second pressure are substantially equal. The second temperature is capable of being utilized to manage substrate temperature.

Abstract translation: 在许多实施例中的一个实施例中，提供了一种用于处理衬底的装置，其包括衬底处理室，其中衬底位于衬底处理室内，使得衬底至少部分地将衬底处理室分离成第一腔室和第二腔室 。 该装置还包括第一室入口，其构造成在第一压力下将第一温度的第一流体输入到第一室中，并且第二室入口被配置成在第二压力下将第二温度的第二流体输入到第二室中， 第一压力和第二压力基本相等。 第二个温度可以用来管理衬底温度。

公开(公告)号：WO2003078859A3

公开(公告)日：2003-09-25

申请号：PCT/US2003/007389

申请日：2003-03-10

Applicant: LAM RESEARCH CORPORATION

Inventor： LIN, Jibing ,  HYMES, Diane, J.

IPC: B65G15/34

Abstract: A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt.

公开(公告)号：WO2005117084A1

公开(公告)日：2005-12-08

申请号：PCT/US2005/016779

申请日：2005-05-13

Applicant: BATTELLE MEMORIAL INSTITUTE ,  LAM RESEARCH CORPORATION ,  YONKER, Clement, R. ,  FULTON, John, L. ,  GASPAR, Daniel, J. ,  HYMES, Diane, J.

Inventor： YONKER, Clement, R. ,  FULTON, John, L. ,  GASPAR, Daniel, J. ,  HYMES, Diane, J.

IPC: H01L21/311

CPC classification number: H01L21/31116 ,  B08B7/0021 ,  C23F1/34 ,  H01L21/02052 ,  H01L21/32115 ,  H01L21/32134

Abstract: The present invention generally relates to methods for processing materials. More particularly, the present invention relates to reactive fluids and uses thereof for removing deposition materials, including, but not limited to, overburden materials, metals, non-metals, layered materials, organics, polymers, and semiconductor materials. The instant invention finds application in such commercial processes as semiconductor chip manufacturing.

Abstract translation: 本发明一般涉及加工材料的方法。 更具体地，本发明涉及反应性流体及其用于去除沉积材料的用途，包括但不限于覆盖层材料，金属，非金属，层状材料，有机物，聚合物和半导体材料。 本发明可应用于诸如半导体芯片制造的商业工艺中。

公开(公告)号：WO2003078859A2

公开(公告)日：2003-09-25

申请号：PCT/US2003/007389

申请日：2003-03-10

Applicant: LAM RESEARCH CORPORATION

Inventor： LIN, Jibing ,  HYMES, Diane, J.

IPC: F16G

CPC classification number: B24B37/013 ,  B24B37/205 ,  B24D11/02 ,  B29D29/00 ,  B32B2305/08 ,  B32B2413/00

Abstract: A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt.

Abstract translation: 提供了用于化学机械平面化（CMP）的处理带（150,160,170）。 加工带用网带（154）和机织织物（164）中的一个加强。 处理带包括包围网带以限定处理带的聚合材料（152）。 加工带被制造成使得网带在聚合物材料内形成连续的环，并且网带被构造为相交构件（174）的网格。 相交构件在固定接头（176）处连接以形成用于处理带的刚性支撑结构。