Invention Application
- Patent Title: METHOD FOR THE PRODUCTION OF THIN METAL-CONTAINING LAYERS HAVING LOW ELECTRICAL RESISTANCE
- Patent Title (中): 生产具有低电阻的薄含金属层的方法
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Application No.: PCT/DE0301205Application Date: 2003-04-10
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Publication No.: WO03090257B1Publication Date: 2004-03-04
- Inventor: BARTH HANS-JOACHIM , TEWS HELMUT
- Applicant: INFINEON TECHNOLOGIES AG , BARTH HANS-JOACHIM , TEWS HELMUT
- Assignee: INFINEON TECHNOLOGIES AG,BARTH HANS-JOACHIM,TEWS HELMUT
- Current Assignee: INFINEON TECHNOLOGIES AG,BARTH HANS-JOACHIM,TEWS HELMUT
- Priority: DE10217876 2002-04-22
- Main IPC: C25D5/50
- IPC: C25D5/50 ; C25D7/12 ; H01L21/28 ; H01L21/3205 ; H01L21/768
Abstract:
The invention relates to a method for producing thin metal-containing layers (5C) having low electrical resistance, according to which a metal-containing initial layer (5A) having a first grain size is configured on a carrier material (2) in a first step. A locally restricted heated area (W) is then created and moved within the metal-containing initial layer (5A) in such a way that the metal-containing initial layer (5A) is recrystallized so as to create the metal-containing layer (5C) having a second grain size which is enlarged to the first grain size, whereby a metal-containing layer having improved electrical properties is obtained.
Public/Granted literature
- WO03090257A2 METHOD FOR THE PRODUCTION OF THIN METAL-CONTAINING LAYERS HAVING LOW ELECTRICAL RESISTANCE Public/Granted day:2003-10-30
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