Invention Application
WO03090257B1 METHOD FOR THE PRODUCTION OF THIN METAL-CONTAINING LAYERS HAVING LOW ELECTRICAL RESISTANCE 审中-公开
生产具有低电阻的薄含金属层的方法

METHOD FOR THE PRODUCTION OF THIN METAL-CONTAINING LAYERS HAVING LOW ELECTRICAL RESISTANCE
Abstract:
The invention relates to a method for producing thin metal-containing layers (5C) having low electrical resistance, according to which a metal-containing initial layer (5A) having a first grain size is configured on a carrier material (2) in a first step. A locally restricted heated area (W) is then created and moved within the metal-containing initial layer (5A) in such a way that the metal-containing initial layer (5A) is recrystallized so as to create the metal-containing layer (5C) having a second grain size which is enlarged to the first grain size, whereby a metal-containing layer having improved electrical properties is obtained.
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