发明申请
WO2004033197A3 SUPPORT FOR SUBSTRATES AND COMPOUND COMPRISING A SUPPORT SUBSTRATE AND AN EXTREMELY THIN SUBSTRATE
审中-公开
支撑作用底物和复合材料由载体基板和DÜNNSTSUBSTRAT
- 专利标题： SUPPORT FOR SUBSTRATES AND COMPOUND COMPRISING A SUPPORT SUBSTRATE AND AN EXTREMELY THIN SUBSTRATE
- 专利标题（中）： 支撑作用底物和复合材料由载体基板和DÜNNSTSUBSTRAT
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申请号： PCT/EP0310907申请日： 2003-10-02
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公开(公告)号： WO2004033197A3公开(公告)日： 2004-08-05
- 发明人: KNOCHE SILKE , BOOSS CLAUDIA , ASTHEIMER STEFFEN , WEBER GERHARD , HABECK ANDREAS , OTTERMANN CLEMENS , PLICHTA ARMIN , RUDAS GERD , BOEHM FRANK , VOGES FRANK , ZETTERER THOMAS , ESEMANN HAUKE
- 申请人： SCHOTT GLAS , ZEISS STIFTUNG , KNOCHE SILKE , BOOSS CLAUDIA , ASTHEIMER STEFFEN , WEBER GERHARD , HABECK ANDREAS , OTTERMANN CLEMENS , PLICHTA ARMIN , RUDAS GERD , BOEHM FRANK , VOGES FRANK , ZETTERER THOMAS , ESEMANN HAUKE
- 专利权人： SCHOTT GLAS,ZEISS STIFTUNG,KNOCHE SILKE,BOOSS CLAUDIA,ASTHEIMER STEFFEN,WEBER GERHARD,HABECK ANDREAS,OTTERMANN CLEMENS,PLICHTA ARMIN,RUDAS GERD,BOEHM FRANK,VOGES FRANK,ZETTERER THOMAS,ESEMANN HAUKE
- 当前专利权人： SCHOTT GLAS,ZEISS STIFTUNG,KNOCHE SILKE,BOOSS CLAUDIA,ASTHEIMER STEFFEN,WEBER GERHARD,HABECK ANDREAS,OTTERMANN CLEMENS,PLICHTA ARMIN,RUDAS GERD,BOEHM FRANK,VOGES FRANK,ZETTERER THOMAS,ESEMANN HAUKE
- 优先权： DE20215401 2002-10-07; DE10323303 2003-05-21; DE10323302 2003-05-21; DE10323301 2003-05-21; DE10323304 2003-05-21; DE10330430 2003-07-04; EP0310358 2003-09-18
- 主分类号： B32B17/00
- IPC分类号： B32B17/00 ; B32B33/00 ; C03C27/06 ; C03C27/10 ; C03C27/12 ; H01L21/00 ; H01L21/68
摘要：
The invention relates to a compound comprising: - an extremely thin substrate that is provided with a thickness of
