Invention Application
WO2004104516A3 SPRING CONSTANT CALIBRATION DEVICE 审中-公开
弹簧常数校准装置

SPRING CONSTANT CALIBRATION DEVICE
Abstract:
A calibration device is disclosed. A platform has a substantially planar surface suitable for the landing of an AFM cantilever tip, one or more supporting legs arranged to provide sprung resistance to the platform and a capacitive sensor for measuring the combined spring constant of the one or more supporting legs with respect to displacement substantially perpendicular to said substantially planar surface.
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