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    METHOD AND APPARATUS FOR TOOL MANAGEMENT IN ROBOT SYSTEM
    1.
    发明申请
    METHOD AND APPARATUS FOR TOOL MANAGEMENT IN ROBOT SYSTEM 审中-公开

    公开(公告)号：WO2023035228A1

    公开(公告)日：2023-03-16

    申请号：PCT/CN2021/117711

    申请日：2021-09-10

    Applicant: ABB SCHWEIZ AG ,  CHANG, Kun ,  SHAO, Wenyao ,  XIA, Dianfei

    Inventor： CHANG, Kun ,  SHAO, Wenyao ,  XIA, Dianfei

    IPC: B25J9/16 ,  G01Q40/00

    Abstract: Embodiments of the present disclosure provide methods, apparatuses, systems and computer readable media for managing a tool in a robot system. In a method, a plurality of arm positions of a robot arm of the robot system are obtained when the tool is placed under a posture on a surface of a calibration object for calibrating the tool, here the posture represents rotation parameters of the robot arm. A center of the calibration object is determined based on the plurality of arm positions. A reference position of the robot arm is generated for calibrating the tool based a position of the center and the posture. Further, embodiments of present disclosure provide apparatuses, systems, and computer readable media for managing a tool in a robot system. With these embodiments, reference positions for calibrating the tool may be obtained in an easy and effective way without complex manual operations.

    A CONFOCAL MICROSCOPY APPARATUS
    3.
    发明申请
    A CONFOCAL MICROSCOPY APPARATUS 审中-公开

    公开(公告)号：WO2019169436A1

    公开(公告)日：2019-09-12

    申请号：PCT/AU2019/050188

    申请日：2019-03-05

    Applicant: NEWSOUTH INNOVATIONS PTY LIMITED

    Inventor： GAUS, Katharina ,  SIERECKI, Emma S ,  GAMBIN, Yann ,  BAUER, Arnaud Luc

    IPC: G01B9/02 ,  G02B21/00 ,  G01Q40/00

    Abstract: The present invention relates to microscopy and spectroscopy systems, particularly to confocal microscopy and spectroscopy apparatus. Current confocal microscopes are expensive and difficult to set up and calibrate. The confocal microscope described in this document, comprises a housing, which may be printed, and which includes mounts for receiving optical and other components of the microscope. The positions of the mounts are pre-determined so as to obviate the need for complex calibration of the components. The components and optical path lengths are selected in order to optimise the size of the microscope.

    VERFAHREN ZUM KALIBRIEREN EINES HETERODYNEN ELEKTROSTATISCHEN KRAFTMIKROSKOPS
    4.
    发明申请
    VERFAHREN ZUM KALIBRIEREN EINES HETERODYNEN ELEKTROSTATISCHEN KRAFTMIKROSKOPS 审中-公开

    公开(公告)号：WO2018201170A1

    公开(公告)日：2018-11-08

    申请号：PCT/AT2018/050008

    申请日：2018-05-02

    Applicant: UNIVERSITÄT LINZ

    Inventor： GRAMSE, Georg

    IPC: G01Q40/00 ,  G01Q60/46

    Abstract: Es wird ein Verfahren zum Kalibrieren eines heterodynen elektrostatischen Kraftmikroskops mit einer Probenaufnahme (1) und einer der Probenaufnahme (1) gegenüberliegenden Messsonde (3) beschrieben, die mit einer amplitudenmodulierten, hochfrequenten Wechselspannung beaufschlagt wird, wobei die Schwingungen der Messsonde (3) durch einen Laserdetektor (9) erfasst und dessen Ausgangssignal einem Lock-in-Verstärker (10) zur Bereitstellung eines vom Kapazitätsgradienten zwischen Probe (2) und Messsonde (3) abhängigen Signalanteils zugeführt wird. Um einfache Kalibrierbedingungen zu schaffen wird vorgeschlagen, dass die Amplitude des vom Kapazitätsgradienten zwischen Probe (2) und Messsonde (3) abhängigen Signalanteils durch eine Steuerung der Amplitude der hochfrequenten Wechselspannung des Signalgenerators (6) auf einen konstanten Wert geregelt wird.

    FEEDBACK CORRECTION IN SUB-RESONANT TAPPING MODE OF AN ATOMIC FORCE MICROSCOPE
    5.
    发明申请
    FEEDBACK CORRECTION IN SUB-RESONANT TAPPING MODE OF AN ATOMIC FORCE MICROSCOPE 审中-公开

    公开(公告)号：WO2018140926A1

    公开(公告)日：2018-08-02

    申请号：PCT/US2018/015897

    申请日：2018-01-30

    Applicant: TUFTS UNIVERSITY

    Inventor： ECHOLS-JONES, Piers ,  MESSNER, William, C. ,  SOKOLOV, Igor

    IPC: G01Q40/00

    CPC classification number: G01Q10/065 ,  G01Q60/34

    Abstract: A method of carrying out sub-resonant tapping in an atomic force microscope includes causing a probe that is disposed above a sample to be translated in a direction parallel to a horizontal plane defined by the sample and to oscillate in a vertical direction that is perpendicular to the horizontal plane about an equilibrium line that is separated from the horizontal plane by a vertical offset. As a result, the probe repeatedly taps a surface of the sample. Each tap begins with a first contact of the probe on the surface followed by a progressive increase in force exerted by the sample on the probe until a peak force is attained. The vertical offset is controlled by relying at least in part on a feature other than the peak force as a basis for controlling the vertical offset.

    SPRING CONSTANT CALIBRATION DEVICE
    7.
    发明申请
    SPRING CONSTANT CALIBRATION DEVICE 审中-公开
    弹簧常数校准装置

    公开(公告)号：WO2004104516A3

    公开(公告)日：2005-09-15

    申请号：PCT/GB2004002134

    申请日：2004-05-18

    Applicant: SECRETARY TRADE IND BRIT ,  CUMPSON PETER J

    Inventor： CUMPSON PETER J

    IPC: G01B7/34 ,  G01Q10/00 ,  G01Q40/00 ,  G01Q60/24 ,  G12B21/20

    CPC classification number: G01Q40/00

    Abstract: A calibration device is disclosed. A platform has a substantially planar surface suitable for the landing of an AFM cantilever tip, one or more supporting legs arranged to provide sprung resistance to the platform and a capacitive sensor for measuring the combined spring constant of the one or more supporting legs with respect to displacement substantially perpendicular to said substantially planar surface.

    Abstract translation: 公开了一种校准装置。 平台具有适于AFM悬臂末端着陆的基本上平坦的表面，布置成向平台提供弹性阻力的一个或多个支撑腿和用于测量一个或多个支撑腿相对于平台的组合弹簧常数的电容传感器 位移基本上垂直于所述基本平坦的表面。

    METHOD, TEST STRUCTURE, TEST DEVICE AND DEVICE
    9.
    发明申请
    METHOD, TEST STRUCTURE, TEST DEVICE AND DEVICE 审中-公开

    公开(公告)号：WO2022008675A1

    公开(公告)日：2022-01-13

    申请号：PCT/EP2021/069039

    申请日：2021-07-08

    Applicant: CARL ZEISS SMT GMBH

    Inventor： RHINOW, Daniel ,  SCHÖNEBERG, Johannes

    IPC: G01Q40/00 ,  G01Q40/02 ,  G03F1/72 ,  G03F1/84 ,  H01J37/26 ,  G01Q30/02

    Abstract: A method for determining a geometry of a measuring tip (100) for a scanning probe microscope is proposed. The method comprises the steps of: a) generating (S1) at least one test structure (200), which has elevations (210) alternating with depressions (220) in a first direction (I), wherein the elevations (210) and depressions (220) are aligned parallel to one another in a second direction (II) perpendicular to the first direction (I); b) scanning (S2) the test structure (200) with the measuring tip (100) to ascertain a profile (300) of the test structure (200); and c) determining (S3) the geometry of the measuring tip (100) on the basis of the ascertained profile (300).

    SYSTEMS AND METHODS FOR CHARACTERIZING OPTICAL COUPLING BETWEEN AN OPTICAL PROBE AND A CALIBRATION STRUCTURE
    10.
    发明申请
    SYSTEMS AND METHODS FOR CHARACTERIZING OPTICAL COUPLING BETWEEN AN OPTICAL PROBE AND A CALIBRATION STRUCTURE 审中-公开

    公开(公告)号：WO2021067084A1

    公开(公告)日：2021-04-08

    申请号：PCT/US2020/052127

    申请日：2020-09-23

    Applicant: FORMFACTOR BEAVERTON, INC.

    Inventor： FRANKEL, Joseph, George ,  NEGISHI, Kazuki

    IPC: G01Q40/00 ,  G01R35/00

    Abstract: Probe systems and methods of characterizing optical coupling between an optical probe of a probe system and a calibration structure. The probe systems include a probe assembly that includes an optical probe, a support surface configured to support a substrate, and a signal generation and analysis assembly configured to generate an optical signal and to provide the optical signal to the optical device via the optical probe. The probe systems also include an electrically actuated positioning assembly, a calibration structure configured to receive the optical signal, and an optical detector configured to detect a signal intensity of the optical signal. The probe systems further include a controller programmed to control the probe system to generate a representation of signal intensity as a function of the relative orientation between the optical probe and the calibration structure. The methods include methods of operating the probe systems.

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