Invention Application
WO2005060623A2 METHOD AND APPARATUS FOR CONTROLLING THE OUTPUT OF A GAS DISCHARGE MOPA LASER SYSTEM
审中-公开
用于控制气体放电摩尔定律激光系统输出的方法和装置
- Patent Title: METHOD AND APPARATUS FOR CONTROLLING THE OUTPUT OF A GAS DISCHARGE MOPA LASER SYSTEM
- Patent Title (中): 用于控制气体放电摩尔定律激光系统输出的方法和装置
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Application No.: PCT/US2004/041384Application Date: 2004-12-10
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Publication No.: WO2005060623A2Publication Date: 2005-07-07
- Inventor: RULE, John, A. , ZAMBON, Paulo
- Applicant: CYMER, INC. , RULE, John, A. , ZAMBON, Paulo
- Applicant Address: (a Nevada corporation), 17075 Thornmint Court, San Diego, CA 92127-2413 US
- Assignee: CYMER, INC.,RULE, John, A.,ZAMBON, Paulo
- Current Assignee: CYMER, INC.,RULE, John, A.,ZAMBON, Paulo
- Current Assignee Address: (a Nevada corporation), 17075 Thornmint Court, San Diego, CA 92127-2413 US
- Agency: CRAY, William, C.
- Priority: US10/740,659 20031218
- Main IPC: H01S3/134
- IPC: H01S3/134 ; H01S3/22 ; H01S3/225 ; H01S3/23
Abstract:
A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region.
Information query
