Invention Application
- Patent Title: PHOTORESIST COMPOSITIONS AND PROCESSESS OF USE
- Patent Title (中): 光电组合物和使用过程
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Application No.: PCT/US2005000156Application Date: 2005-01-05
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Publication No.: WO2005067567A3Publication Date: 2006-07-13
- Inventor: WEBER WILLIAM , MORI SATOSHI , HONDA NAO
- Applicant: MICROCHEM CORP , NIPPON KAYAKU KK
- Assignee: MICROCHEM CORP,NIPPON KAYAKU KK
- Current Assignee: MICROCHEM CORP,NIPPON KAYAKU KK
- Priority: US53423704 2004-01-05; US2845505 2005-01-03
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03C1/76 ; G03F7/004 ; G03F7/11 ; G03F7/30 ; G03F7/40
Abstract:
Photoresist compositions that demonstrate superior photolithographic performance and hardened resist films that show superior resistance to solvents, have excellent resistance to under plating during the electrodeposition of metals, and show excellent resist stripping characteristics. These photoresist compositions according to the invention are well-suited as for applications in the manufacture of MEMS and micromachine devices. These photoresist compositions according to the invention comprise one or more epoxide-substituted, polycarboxylic acid Resin Component (A), one or more photoacid generator compounds (B), and one or more solvent (C).
Information query
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