A microvalve device includes a pilot valve and a pilot operated valve. The pilot valve includes a first layer having openings and a second layer having a chamber in communication with the openings, and a movable member for controlling fluid flow. The pilot operated valve includes three plates. Two the openings, and pressure apply and release channels in communication with a spool portion of the pilot operated valve. The spool is movable to allow from a second fluid source to a load. The third plate includes a first source port in communication with a first fluid, the pressure apply and release channel, one of the first plate ports, one of the openings, a first port in communication with a first reservoir, a second port is in communication with the second fluid source and a load port in communication with a load.