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    HYBRID MICRO/MACRO PLATE VALVE
    1.
    发明申请
    HYBRID MICRO/MACRO PLATE VALVE 审中-公开

    公开(公告)号：WO2005084211A3

    公开(公告)日：2005-09-15

    申请号：PCT/US2005/005963

    申请日：2005-02-25

    Applicant: ALUMINA MICRO LLC ,  FULLER, Edward, Nelson

    Inventor： FULLER, Edward, Nelson

    IPC: F16K31/00

    Abstract: A microvalve device includes a pilot valve and a pilot operated valve. The pilot valve includes a first layer having openings and a second layer having a chamber in communication with the openings, and a movable member for controlling fluid flow. The pilot operated valve includes three plates. Two the openings, and pressure apply and release channels in communication with a spool portion of the pilot operated valve. The spool is movable to allow from a second fluid source to a load. The third plate includes a first source port in communication with a first fluid, the pressure apply and release channel, one of the first plate ports, one of the openings, a first port in communication with a first reservoir, a second port is in communication with the second fluid source and a load port in communication with a load.

    SELECTIVE BONDING FOR FORMING A MICROVALVE
    4.
    发明申请
    SELECTIVE BONDING FOR FORMING A MICROVALVE 审中-公开
    选择性粘结形成微孔

    公开(公告)号：WO2005091820A2

    公开(公告)日：2005-10-06

    申请号：PCT/US2005/004821

    申请日：2005-02-15

    Applicant: ALUMINA MICRO LLC ,  DAVIES, Brady, Reuben

    Inventor： DAVIES, Brady, Reuben

    IPC: B29C65/00 ,  B29C65/02 ,  B29C65/48

    CPC classification number: B29C66/54 ,  B29C65/02 ,  B29C65/48 ,  B29C66/004 ,  B29C66/026 ,  B29C66/5346 ,  B29C66/543 ,  B29C66/71 ,  B29C66/73171 ,  B29L2031/756 ,  Y10T156/10 ,  B29K2083/00

    Abstract: A method for forming a micromachined device is disclosed that includes providing a first silicon layer and a second silicon layer. A portion of the second silicon layer is etched to form a slider portion and a layer portion. The slider portion is movable relative to the layer portion. A portion of the first silicon layer is coated with a coating material that has a size and shape that corresponds to the size and shape of the slider portion. The first silicon layer is then positioned over the second silicon layer such that the coated portion of the first silicon layers substantially aligned with the slider portion of the second silicon layer. A bonding operation is performed to bond the first silicon layer to the second silicon layer. The coating material separates the slider portion from the first silicon layer during the bonding operation to prevent the slider portion from bonding with the first layer. This method can also be implemented by selectively coating portions of the first silicon layer with a coating that will enhance or cause bonding only in areas adjacent to the coating material. A hybrid process whereby one material is placed in portions of the first silicon layer to prevent bonding and a second material is placed in other portions of the first silicon layer to enhance or cause bonding is also possible.

    Abstract translation: 公开了一种用于形成微加工装置的方法，其包括提供第一硅层和第二硅层。 蚀刻第二硅层的一部分以形成滑块部分和层部分。 滑块部分可相对于层部分移动。 第一硅层的一部分涂覆有具有对应于滑块部分的尺寸和形状的尺寸和形状的涂层材料。 然后将第一硅层定位在第二硅层之上，使得第一硅层的涂覆部分基本上与第二硅层的滑块部分对准。 执行接合操作以将第一硅层粘合到第二硅层。 涂层材料在接合操作期间将滑块部分与第一硅层分离，以防止滑块部分与第一层结合。 该方法也可以通过用仅在邻近涂层材料的区域中增强或引起粘合的涂层选择性地涂覆第一硅层的部分来实现。 一种混合工艺，其中一种材料被放置在第一硅层的部分中以防止接合，并且第二材料被放置在第一硅层的其他部分中以增强或引起粘合也是可能的。

    HYBRID MICRO/MACRO PLATE VALVE
    5.
    发明申请
    HYBRID MICRO/MACRO PLATE VALVE 审中-公开
    混合微型/大型板阀

    公开(公告)号：WO2005084211A2

    公开(公告)日：2005-09-15

    申请号：PCT/US2005005963

    申请日：2005-02-25

    Applicant: ALUMINA MICRO LLC ,  FULLER EDWARD NELSON

    Inventor： FULLER EDWARD NELSON

    CPC classification number: F16K99/0001 ,  F16K99/0011 ,  F16K99/0034 ,  F16K99/0044 ,  F16K2099/008 ,  F16K2099/0098

    Abstract: A microvalve device includes a microvalve pilot valve and a pilot operated valve. The microvalve pilot valve includes a first layer, a third layer having a plurality of openings formed therethrough, and a second layer positioned between the first and third layer. The second layer includes a chamber in fluid communication with the openings, and includes a movable member for selectively controlling fluid flow though the chamber and between the openings. The pilot operated valve includes a first plate, a third plate, and a second plate positioned between the first plate and the third plate. The first plate includes a plurality of ports in fluid communication with the openings of the microvalve, a pressure apply channel, and a pressure release channel. The second plate includes the pressure apply channel and the pressure release channel, both of the channels being in fluid communication with a spool portion of the pilot operated valve. The spool portion is selectively movable to allow flow from a second source of fluid to a load. The third plate includes a first source port in fluid communication with a first fluid source, the pressure apply channel, one of the first plate ports, and one of the microvalve openings. A first reservoir port of the third plate ports, and one of the microvalve openings. A first reservoir port of the third plate is in fluid communication with a first reservoir, the pressure release channel, one of the first plate ports, and one of the microvalve openings. A second source port of the third plate is in fluid communication with the second source of fluid. A load port of the third plate is in fluid communication with the load.

    Abstract translation: 微型阀装置包括微阀先导阀和先导式操作阀。 微阀先导阀包括第一层，具有穿过其形成的多个开口的第三层和位于第一层和第三层之间的第二层。 第二层包括与开口流体连通的室，并且包括可移动构件，用于选择性地控制通过腔室和开口之间的流体流动。 先导阀包括第一板，第三板和位于第一板和第三板之间的第二板。 第一板包括与微型阀的开口流体连通的多个端口，压力施加通道和压力释放通道。 第二板包括压力施加通道和压力释放通道，两个通道与先导操作阀的阀芯部分流体连通。 阀芯部分选择性地可移动以允许从第二流体源流向负载。 第三板包括与第一流体源流体连通的第一源端口，压力施加通道，第一板端口之一和微型阀门开口之一。 第三板端口的第一储存口和微阀开口之一。 第三板的第一储存端口与第一储存器，压力释放通道，第一板端口中的一个和微阀开口之一流体连通。 第三板的第二源端口与第二流体源流体连通。 第三板的负载端口与负载流体连通。

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