发明申请
WO2005103504A3 HIGH PRESSURE CAPILLARY MICRO-FLUIDIC VALVE DEVICE AND A METHOD OF FABRICATING SAME 审中-公开
高压毛细管流体阀装置及其制造方法

HIGH PRESSURE CAPILLARY MICRO-FLUIDIC VALVE DEVICE AND A METHOD OF FABRICATING SAME
摘要:
A freeze-thaw valve and a method of micro-machining the freeze-thaw valve is provided and includes a valve housing, wherein the valve housing defines a housing cavity and includes a housing inlet, a housing vent, a capillary tubing inlet and a capillary tubing outlet. A valve body is provided, at least a portion of which is lithographically constructed, wherein the valve body includes a refrigerant inlet, a refrigerant outlet and an expansion chamber. The expansion chamber is disposed to communicate the refrigerant inlet with the refrigerant outlet and includes a restriction region having a flow restriction. Additionally, the valve body is disposed within the housing cavity to form an insulating channel between the valve housing and the valve body.
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