Invention Application
WO2006055348A2 METHOD OF FORMING COATED ARTICLE USING SPUTTERING TARGET(S) AND ION SOURCE(S) AND CORRESPONDING APPARATUS 审中-公开
使用溅射目标(S)和离子源(S)和相应装置形成涂覆物品的方法

METHOD OF FORMING COATED ARTICLE USING SPUTTERING TARGET(S) AND ION SOURCE(S) AND CORRESPONDING APPARATUS
Abstract:
A coated article is provided that may be used as a vehicle windshield, insulating glass (IG) window unit, or the like. An ion beam is used to treat an infrared (IR) reflecting layer(s) of such a coated article. Advantageously, this has been found to improve sheet resistance (R s ) properties, emittance, solar control properties, and/or durability of the coated article. In certain example embodiments, an ion source(s) and a sputtering target(s) used in forming the IR reflecting layer, or any other suitable layer, may be located in a common deposition chamber of an apparatus used in forming at least part of the coating.
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