公开(公告)号：WO2007050307A2

公开(公告)日：2007-05-03

申请号：PCT/US2006/039875

申请日：2006-10-13

Applicant: GUARDIAN INDUSTRIES CORP. ,  RICHERT, Hendryk ,  WIELAND, Patrick ,  SCHMIDT, Armin ,  JANICKE, Gerald ,  WEIDL, Roland ,  GRUENLER, Bernd, E. ,  TILLER, Hans-jurgen ,  KRILTZ, Uwe

Inventor： RICHERT, Hendryk ,  WIELAND, Patrick ,  SCHMIDT, Armin ,  JANICKE, Gerald ,  WEIDL, Roland ,  GRUENLER, Bernd, E. ,  TILLER, Hans-jurgen ,  KRILTZ, Uwe

CPC classification number: H01J37/3405 ,  H01J37/3497

Abstract: A sputtering target includes an outer target tube, an inner support tube of rectangular cross-sectional shape supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within said inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a chamber radially between the inner support tube and the outer target tube; and at least one cooling water outlet at the one end of the inner support tube.

Abstract translation: 溅射靶包括外目标管，支撑沿着内支撑管的整个长度延伸的磁体载体的矩形横截面形状的内支撑管; 以及水冷却回路，其包括在所述内部支撑管内的至少一个通道，其一端处的入口适于接收来自外部源的冷却水，在其相对端处的至少一个出口孔径向地在所述内部 支撑管和外目标管; 以及在内支撑管的一端的至少一个冷却水出口。

公开(公告)号：WO2007050304A1

公开(公告)日：2007-05-03

申请号：PCT/US2006/039855

申请日：2006-10-13

Applicant: GUARDIAN INDUSTRIES CORP. ,  SCHMIDT, Armin ,  JANICKE, Gerald ,  WEIDL, Roland ,  RICHERT, Hendryk ,  GRUENLER, Bernd, E. ,  TILLER, Hans-jurgen ,  KRILTZ, Uwe

Inventor： SCHMIDT, Armin ,  JANICKE, Gerald ,  WEIDL, Roland ,  RICHERT, Hendryk ,  GRUENLER, Bernd, E. ,  TILLER, Hans-jurgen ,  KRILTZ, Uwe

IPC: H01J37/34

CPC classification number: H01J37/3497 ,  H01J37/3405

Abstract: A sputtering target comprising an outer target tube (14), an inner support tube (22) supporting a magnet carrier (24) extending along substantially the entire length of the inner support tube? and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling chamber radially between the inner support tube and the outer target tube; and a plurality of spiral vane segments (50, 52) attached to an outer surface of the inner support tube.

Abstract translation: 一种溅射靶，包括外目标管（14），支撑沿着内支撑管的大致整个长度延伸的磁体载体（24）的内支撑管（22） 以及水冷却回路，其包括在所述内部支撑管内的至少一个通道，其一端处的入口适于从外部源接收冷却水;至少一个在其相对端处的出口孔， 内支撑管和外目标管; 以及附接到所述内支撑管的外表面的多个螺旋叶片段（50,52）。

公开(公告)号：WO2007050307A3

公开(公告)日：2007-07-26

申请号：PCT/US2006039875

申请日：2006-10-13

Applicant: GUARDIAN INDUSTRIES ,  RICHERT HENDRYK ,  WIELAND PATRICK ,  SCHMIDT ARMIN ,  JANICKE GERALD ,  WEIDL ROLAND ,  GRUENLER BERND E ,  TILLER HANS-JURGEN ,  KRILTZ UWE

Inventor： RICHERT HENDRYK ,  WIELAND PATRICK ,  SCHMIDT ARMIN ,  JANICKE GERALD ,  WEIDL ROLAND ,  GRUENLER BERND E ,  TILLER HANS-JURGEN ,  KRILTZ UWE

IPC: H01J37/32

CPC classification number: H01J37/3405 ,  H01J37/3497

Abstract: A sputtering target includes an outer target tube (90), an inner support tube (54) of rectangular cross-sectional shape supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within said inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a chamber radially between the inner support tube and the outer target tube; and at least one cooling water outlet at the one end of the inner support tube .

Abstract translation: 溅射靶包括外部目标管（90），支撑沿着内部支撑管的整个长度延伸的磁体载体的矩形横截面形状的内部支撑管（54） 以及水冷却回路，其包括在所述内部支撑管内的至少一个通道，其一端处的入口适于接收来自外部源的冷却水，在其相对端处的至少一个出口孔径向地在所述内部 支撑管和外目标管; 以及在内支撑管的一端的至少一个冷却水出口。

公开(公告)号：WO2007050305A1

公开(公告)日：2007-05-03

申请号：PCT/US2006/039856

申请日：2006-10-13

Applicant: GUARDIAN INDUSTRIES CORP. ,  RICHERT, Hendryk ,  KRILTZ, Uwe ,  SCHMIDT, Armin ,  WEIDEL, Roland ,  JANICKE, Gerald

Inventor： RICHERT, Hendryk ,  KRILTZ, Uwe ,  SCHMIDT, Armin ,  WEIDEL, Roland ,  JANICKE, Gerald

IPC: H01J37/34

CPC classification number: H01J37/3497 ,  H01J37/3405

Abstract: A sputtering target includes an outer target tube (14), an inner support tube (22) supporting a magnet carrier bar (24) extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling plenum radially between the inner support tube and the outer target tube; and a baffle comprising a substantially flat plate (50) attached to the inner support tube adjacent the opposite end, the plate extending radially within the plenum between the inner support tube and the outer target tube and having an array of flow apertures (56) therein.

Abstract translation: 溅射靶包括外目标管（14），支撑沿着内支撑管的大致整个长度延伸的磁体承载杆（24）的内支撑管（22） 以及水冷却回路，其包括在所述内支撑管内的至少一个通道，其一端处的入口适于从外部源接收冷却水，所述至少一个出口在其相对端处径向地通向所述冷却室， 内支撑管和外目标管; 以及挡板，其包括附接到相邻端部的内支撑管的基本平坦的板（50），所述板在所述内支撑管和所述外目标管之间的所述增压室内径向延伸并且在其内具有排列的流动孔（56） 。

公开(公告)号：WO2006055348A2

公开(公告)日：2006-05-26

申请号：PCT/US2005040469

申请日：2005-11-08

Applicant: CT LUXEMBOURGEOIS RECH VERRE ,  GUARDIAN INDUSTRIES ,  KRILTZ UWE ,  BUTZ JOCHEN ,  JANICKE GERALD ,  VEERASAMY VIJAYEN S

Inventor： KRILTZ UWE ,  BUTZ JOCHEN ,  JANICKE GERALD ,  VEERASAMY VIJAYEN S

CPC classification number: C23C14/0652 ,  B32B17/10036 ,  B32B17/10174 ,  C03C17/002 ,  C03C17/36 ,  C03C17/3618 ,  C03C17/3626 ,  C03C17/3639 ,  C03C17/3644 ,  C03C17/3652 ,  C03C17/366 ,  C03C17/3681 ,  C03C2217/78 ,  C03C2218/154 ,  C03C2218/32 ,  C23C14/086 ,  C23C14/185 ,  C23C14/3442 ,  C23C14/35 ,  C23C14/568 ,  H01J37/3053 ,  H01J2237/3146

Abstract: A coated article is provided that may be used as a vehicle windshield, insulating glass (IG) window unit, or the like. An ion beam is used to treat an infrared (IR) reflecting layer(s) of such a coated article. Advantageously, this has been found to improve sheet resistance (R s ) properties, emittance, solar control properties, and/or durability of the coated article. In certain example embodiments, an ion source(s) and a sputtering target(s) used in forming the IR reflecting layer, or any other suitable layer, may be located in a common deposition chamber of an apparatus used in forming at least part of the coating.

Abstract translation: 提供了可用作车辆挡风玻璃，中空玻璃（IG）窗单元等的涂覆制品。 使用离子束来处理这种涂覆制品的红外（IR）反射层。 有利的是，已经发现，这提高了涂层制品的薄层电阻（R SUB）性质，发射率，太阳能控制性能和/或耐久性。 在某些示例性实施例中，用于形成IR反射层的任何一个或多个离子源和溅射靶或任何其它合适的层可以位于用于形成至少部分 涂层。

公开(公告)号：WO2006055348A3

公开(公告)日：2006-05-26

申请号：PCT/US2005/040469

申请日：2005-11-08

Applicant: CENTRE LUXEMBOURGEOIS DE RECHERCHES POUR LE VERRE ET LA CERAMIQUE S.A. (C.R.V.C) ,  GUARDIAN INDUSTRIES CORP. ,  KRILTZ, Uwe ,  BUTZ, Jochen ,  JANICKE, Gerald ,  VEERASAMY, Vijayen, S.

Inventor： KRILTZ, Uwe ,  BUTZ, Jochen ,  JANICKE, Gerald ,  VEERASAMY, Vijayen, S.

IPC: H01J37/317 ,  C23C14/06 ,  C23C14/08 ,  C23C14/18 ,  C03C17/36 ,  C23C14/35 ,  C23C14/46 ,  C23C14/56 ,  C23C14/58

Abstract: A coated article is provided that may be used as a vehicle windshield, insulating glass (IG) window unit, or the like. An ion beam is used to treat an infrared (IR) reflecting layer(s) of such a coated article. Advantageously, this has been found to improve sheet resistance (R s ) properties, emittance, solar control properties, and/or durability of the coated article. In certain example embodiments, an ion source(s) and a sputtering target(s) used in forming the IR reflecting layer, or any other suitable layer, may be located in a common deposition chamber of an apparatus used in forming at least part of the coating.