Invention Application
WO2006076261A2 METHOD AND APPARATUS FOR CONTROLLING THE OUTPUT OF A GAS DISCHARGE LASER SYSTEM
审中-公开
用于控制气体放电激光系统输出的方法和装置
- Patent Title: METHOD AND APPARATUS FOR CONTROLLING THE OUTPUT OF A GAS DISCHARGE LASER SYSTEM
- Patent Title (中): 用于控制气体放电激光系统输出的方法和装置
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Application No.: PCT/US2006/000603Application Date: 2006-01-09
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Publication No.: WO2006076261A2Publication Date: 2006-07-20
- Inventor: RULE, John, A. , ZAMBON, Paolo , WATSON, Tom, A. , MESINA, Omez, S. , ZHENG, Weijie
- Applicant: CYMER, INC. , RULE, John, A. , ZAMBON, Paolo , WATSON, Tom, A. , MESINA, Omez, S. , ZHENG, Weijie
- Applicant Address: 17075 Thornmint Court, San Diego, CA 92127-2413 US
- Assignee: CYMER, INC.,RULE, John, A.,ZAMBON, Paolo,WATSON, Tom, A.,MESINA, Omez, S.,ZHENG, Weijie
- Current Assignee: CYMER, INC.,RULE, John, A.,ZAMBON, Paolo,WATSON, Tom, A.,MESINA, Omez, S.,ZHENG, Weijie
- Current Assignee Address: 17075 Thornmint Court, San Diego, CA 92127-2413 US
- Agency: CRAY, William, C.
- Priority: US11/035,938 20050113
- Main IPC: H01S3/22
- IPC: H01S3/22
Abstract:
The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.
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