Invention Application
WO2007078955A3 SUBSTRATE PREPARATION USING STABILIZED FLUID SOLUTIONS AND METHODS FOR MAKING STABLE FLUID SOLUTIONS
审中-公开
使用稳定流体解决方案的基板制备和制备稳定流体溶液的方法
- Patent Title: SUBSTRATE PREPARATION USING STABILIZED FLUID SOLUTIONS AND METHODS FOR MAKING STABLE FLUID SOLUTIONS
- Patent Title (中): 使用稳定流体解决方案的基板制备和制备稳定流体溶液的方法
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Application No.: PCT/US2006048548Application Date: 2006-12-18
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Publication No.: WO2007078955A3Publication Date: 2008-02-07
- Inventor: FREER ERIK M , DE LARIOS JOHN M , RAVKIN MICHAEL , KOROLIK MIKHAIL , MIKHAYLICHENKO KATRINA , REDEKER FRED C
- Applicant: LAM RES CORP , FREER ERIK M , DE LARIOS JOHN M , RAVKIN MICHAEL , KOROLIK MIKHAIL , MIKHAYLICHENKO KATRINA , REDEKER FRED C
- Assignee: LAM RES CORP,FREER ERIK M,DE LARIOS JOHN M,RAVKIN MICHAEL,KOROLIK MIKHAIL,MIKHAYLICHENKO KATRINA,REDEKER FRED C
- Current Assignee: LAM RES CORP,FREER ERIK M,DE LARIOS JOHN M,RAVKIN MICHAEL,KOROLIK MIKHAIL,MIKHAYLICHENKO KATRINA,REDEKER FRED C
- Priority: US75537705 2005-12-30
- Main IPC: C11D7/32
- IPC: C11D7/32
Abstract:
A method for making a solution for use in preparing a surface of a substrate is provided. The method includes providing a continuous medium that adds a polymer material to the continuous medium. A fatty acid is adding to the continuous medium having the polymer material, and the polymer material defines a physical network that exerts forces in the solution that overcome buoyancy forces experienced by the fatty acid, thus preventing the fatty acids from moving within the solution until a yield stress of the polymer material is exceeded by an applied agitation. The applied agitation is from transporting the solution from a container to a preparation station that applies the solution to the surface of the substrate.
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