Invention Application
WO2007081522A2 A PROBE ARRAY STRUCTURE AND A METHOD OF MAKING A PROBE ARRAY STRUCTURE
审中-公开
探索阵列结构和制作探测阵列结构的方法
- Patent Title: A PROBE ARRAY STRUCTURE AND A METHOD OF MAKING A PROBE ARRAY STRUCTURE
- Patent Title (中): 探索阵列结构和制作探测阵列结构的方法
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Application No.: PCT/US2006/048723Application Date: 2006-12-19
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Publication No.: WO2007081522A2Publication Date: 2007-07-19
- Inventor: ELDRIDGE, Benjamin, N. , FANG, Treliant , GRITTERS, John K. , KHANDROS, Igor, Y. , MA, Lunyu , MATHIEU, Gaetan, L.
- Applicant: FORMFACTOR, INC. , ELDRIDGE, Benjamin, N. , FANG, Treliant , GRITTERS, John K. , KHANDROS, Igor, Y. , MA, Lunyu , MATHIEU, Gaetan, L.
- Applicant Address: 7005 Southfront Road, Livermore, California 94551 US
- Assignee: FORMFACTOR, INC.,ELDRIDGE, Benjamin, N.,FANG, Treliant,GRITTERS, John K.,KHANDROS, Igor, Y.,MA, Lunyu,MATHIEU, Gaetan, L.
- Current Assignee: FORMFACTOR, INC.,ELDRIDGE, Benjamin, N.,FANG, Treliant,GRITTERS, John K.,KHANDROS, Igor, Y.,MA, Lunyu,MATHIEU, Gaetan, L.
- Current Assignee Address: 7005 Southfront Road, Livermore, California 94551 US
- Agency: MERKADEAU, Stuart, L. et al.
- Priority: US11/306,574 20060103
- Main IPC: G01R31/02
- IPC: G01R31/02
Abstract:
Probe array structures and methods of making probe array structures are disclosed. A plurality of electrically conductive elongate contact structures disposed on a first substrate can be provided. The contact structures can then be partially encased in a securing material such that ends of the contact structures extend from a surface of the securing material. The exposed portions of the contact structures can then be captured in a second substrate.
Information query
