公开(公告)号：WO2011031759A3

公开(公告)日：2011-08-25

申请号：PCT/US2010048129

申请日：2010-09-08

Applicant: FORMFACTOR INC ,  ELDRIDGE BENJAMIN N ,  FANG TRELIANT ,  MATHIEU GAETAN L ,  YAGLIOGLU ONNIK

Inventor： ELDRIDGE BENJAMIN N ,  FANG TRELIANT ,  MATHIEU GAETAN L ,  YAGLIOGLU ONNIK

IPC: B82B3/00 ,  B82B1/00 ,  C01B31/02

CPC classification number: B82Y40/00 ,  B82Y10/00 ,  B82Y30/00 ,  C01B32/16 ,  C01B2202/08 ,  G01R1/06755 ,  G01R3/00 ,  Y10T29/49117

Abstract: Carbon nanotube columns each comprising carbon nanotubes can be utilized as electrically conductive contact probes. The columns can be grown, and parameters of a process for growing the columns can be varied while the columns grow to vary mechanical characteristics of the columns along the growth length of the columns. Metal can then be deposited inside and/or on the outside of the columns, which can enhance the electrical conductivity of the columns. The metalized columns can be coupled to terminals of a wiring substrate. Contact tips can be formed at or attached to ends of the columns. The wiring substrate can be combined with other electronic components to form an electrical apparatus in which the carbon nanotube columns can function as contact probes.

Abstract translation: 每个包含碳纳米管的碳纳米管柱可用作导电接触探针。 柱可以生长，并且用于生长柱的方法的参数可以变化，同时柱生长以改变柱沿着生长长度的机械特性。 然后可以将金属沉积在柱的内部和/或外部，这可以增强柱的导电性。 金属化柱可以连接到布线基板的端子。 接触尖端可以形成在柱或端附近。 布线基板可以与其他电子部件组合以形成其中碳纳米管柱可用作接触探针的电气设备。

公开(公告)号：WO2011031759A2

公开(公告)日：2011-03-17

申请号：PCT/US2010/048129

申请日：2010-09-08

Applicant: FORMFACTOR, INC. ,  ELDRIDGE, Benjamin N. ,  FANG, Treliant ,  MATHIEU, Gaetan L. ,  YAGLIOGLU, Onnik

Inventor： ELDRIDGE, Benjamin N. ,  FANG, Treliant ,  MATHIEU, Gaetan L. ,  YAGLIOGLU, Onnik

IPC: B82B3/00 ,  B82B1/00 ,  C01B31/02

CPC classification number: B82Y40/00 ,  B82Y10/00 ,  B82Y30/00 ,  C01B32/16 ,  C01B2202/08 ,  G01R1/06755 ,  G01R3/00 ,  Y10T29/49117

Abstract: Carbon nanotube columns each comprising carbon nanotubes can be utilized as electrically conductive contact probes. The columns can be grown, and parameters of a process for growing the columns can be varied while the columns grow to vary mechanical characteristics of the columns along the growth length of the columns. Metal can then be deposited inside and/or on the outside of the columns, which can enhance the electrical conductivity of the columns. The metalized columns can be coupled to terminals of a wiring substrate. Contact tips can be formed at or attached to ends of the columns. The wiring substrate can be combined with other electronic components to form an electrical apparatus in which the carbon nanotube columns can function as contact probes.

Abstract translation: 各自包含碳纳米管的碳纳米管柱可以用作导电接触探针。 可以生长这些柱，并且生长柱的过程的参数可以变化，同时柱生长以改变沿着柱的生长长度的柱的机械特性。 然后金属可以沉积在柱内部和/或外部，这可以增强柱的导电性。 金属化柱可以连接到布线基板的端子。 触点尖端可以形成在或连接到柱的末端。 布线基板可以与其他电子部件组合以形成电气设备，其中碳纳米管柱可以用作接触探针。

公开(公告)号：WO2007081522A3

公开(公告)日：2009-02-12

申请号：PCT/US2006048723

申请日：2006-12-19

Applicant: FORMFACTOR INC ,  ELDRIDGE BENJAMIN N ,  FANG TRELIANT ,  GRITTERS JOHN K ,  KHANDROS IGOR Y ,  MA LUNYU ,  MATHIEU GAETAN L

Inventor： ELDRIDGE BENJAMIN N ,  FANG TRELIANT ,  GRITTERS JOHN K ,  KHANDROS IGOR Y ,  MA LUNYU ,  MATHIEU GAETAN L

IPC: G01R31/02

CPC classification number: G01R3/00 ,  G01R1/06716 ,  G01R1/06727 ,  G01R1/06744

Abstract: Probe array structures and methods of making probe array structures are disclosed. A plurality of electrically conductive elongate contact structures disposed on a first substrate can be provided. The contact structures can then be partially encased in a securing material such that ends of the contact structures extend from a surface of the securing material. The exposed portions of the contact structures can then be captured in a second substrate.

Abstract translation: 公开了探针阵列结构和制造探针阵列结构的方法。 可以提供设置在第一基板上的多个导电细长接触结构。 然后可以将接触结构部分地包封在固定材料中，使得接触结构的端部从固定材料的表面延伸。 然后接触结构的暴露部分可以在第二衬底中被捕获。

公开(公告)号：WO2007081522A2

公开(公告)日：2007-07-19

申请号：PCT/US2006/048723

申请日：2006-12-19

Applicant: FORMFACTOR, INC. ,  ELDRIDGE, Benjamin, N. ,  FANG, Treliant ,  GRITTERS, John K. ,  KHANDROS, Igor, Y. ,  MA, Lunyu ,  MATHIEU, Gaetan, L.

Inventor： ELDRIDGE, Benjamin, N. ,  FANG, Treliant ,  GRITTERS, John K. ,  KHANDROS, Igor, Y. ,  MA, Lunyu ,  MATHIEU, Gaetan, L.

IPC: G01R31/02

CPC classification number: G01R3/00 ,  G01R1/06716 ,  G01R1/06727 ,  G01R1/06744

Abstract: Probe array structures and methods of making probe array structures are disclosed. A plurality of electrically conductive elongate contact structures disposed on a first substrate can be provided. The contact structures can then be partially encased in a securing material such that ends of the contact structures extend from a surface of the securing material. The exposed portions of the contact structures can then be captured in a second substrate.

Abstract translation: 公开了探针阵列结构和制造探针阵列结构的方法。 可以提供设置在第一基板上的多个导电细长接触结构。 然后可以将接触结构部分地包封在固定材料中，使得接触结构的端部从固定材料的表面延伸。 然后接触结构的暴露部分可以在第二衬底中被捕获。

公开(公告)号：WO2007075998A3

公开(公告)日：2008-05-02

申请号：PCT/US2006048989

申请日：2006-12-19

Applicant: FORMFACTOR INC ,  MATHIEU GAETAN L ,  FANG TRELIANT ,  HOBBS ERIC D

Inventor： MATHIEU GAETAN L ,  FANG TRELIANT ,  HOBBS ERIC D

IPC: H01L21/20

CPC classification number: B81C1/0046 ,  B33Y10/00 ,  B81B2201/014 ,  B81B2203/0118 ,  B81C2201/0184 ,  B81C2201/0197 ,  C23C18/1608 ,  C23C18/1844 ,  C25D1/003 ,  C25D1/12 ,  C25D5/02 ,  G01R1/06755 ,  G01R3/00 ,  H01L21/288 ,  H01L21/76873 ,  H01L2924/0001 ,  H01L2924/0002 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01033 ,  H01L2924/01055 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/1461 ,  H05K3/1275 ,  H01L2224/13099 ,  H01L2924/00

Abstract: Systems and methods for depositing a plurality of droplets in a three-dimensional array are disclosed. The array can comprise a first type of droplets disposed to form a support structure and a second type of droplets forming a conductive seed layer on the support structure. A structure material can be electrodeposited onto the seed layer to create a three-dimensional structure.

Abstract translation: 公开了用于在三维阵列中沉积多个液滴的系统和方法。 阵列可以包括设置成形成支撑结构的第一类型的液滴和在支撑结构上形成导电种子层的第二类型的液滴。 可以将结构材料电沉积到种子层上以产生三维结构。

公开(公告)号：WO2007075998A2

公开(公告)日：2007-07-05

申请号：PCT/US2006/048989

申请日：2006-12-19

Applicant: FORMFACTOR, INC. ,  MATHIEU, Gaetan, L. ,  FANG, Treliant ,  HOBBS, Eric D.

Inventor： MATHIEU, Gaetan, L. ,  FANG, Treliant ,  HOBBS, Eric D.

IPC: H01L21/00

CPC classification number: B81C1/0046 ,  B33Y10/00 ,  B81B2201/014 ,  B81B2203/0118 ,  B81C2201/0184 ,  B81C2201/0197 ,  C23C18/1608 ,  C23C18/1844 ,  C25D1/003 ,  C25D1/12 ,  C25D5/02 ,  G01R1/06755 ,  G01R3/00 ,  H01L21/288 ,  H01L21/76873 ,  H01L2924/0001 ,  H01L2924/0002 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01033 ,  H01L2924/01055 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/1461 ,  H05K3/1275 ,  H01L2224/13099 ,  H01L2924/00

Abstract: Systems and methods for depositing a plurality of droplets in a three-dimensional array are disclosed. The array can comprise a first type of droplets disposed to form a support structure and a second type of droplets forming a conductive seed layer on the support structure. A structure material can be electrodeposited onto the seed layer to create a three-dimensional structure.

Abstract translation: 公开了用于在三维阵列中沉积多个液滴的系统和方法。 阵列可以包括设置成形成支撑结构的第一类型的液滴和在支撑结构上形成导电种子层的第二类型的液滴。 结构材料可以电沉积到种子层上以产生三维结构。