Invention Application
WO2007098306A3 CAP LAYER FOR AN ALUMINUM COPPER BOND PAD 审中-公开
铝箔铜箔垫

CAP LAYER FOR AN ALUMINUM COPPER BOND PAD
Abstract:
A bond pad (25) for an electronic device (10) such as an integrated circuit makes electrical connection to an underlying device (14) via an interconnect layer (16). The bond pad has a first layer (24) of a material that is aluminum and copper and a second layer (26), over the first layer (26), of a second material that is aluminum and is essentially free of copper. The second layer (26) functions as a cap to the first layer (24) for preventing copper in the first layer (24) from being corroded by residual chemical elements. A wire (32) such as a gold wire may be bonded to the second layer (26) of the bond pad.
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