Invention Application
- Patent Title: GAAS INTEGRATED CIRCUIT DEVICE AND METHOD OF ATTACHING SAME
- Patent Title (中): GAAS集成电路装置及其连接方法
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Application No.: PCT/US2007006079Application Date: 2007-03-09
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Publication No.: WO2007108964A3Publication Date: 2008-06-12
- Inventor: SHEN HONG , RAMANATHAN RAVI , LUO QIULIANG , WARREN ROBERT W , ABDALI USAMA K
- Applicant: SKYWORKS SOLUTIONS INC , SHEN HONG , RAMANATHAN RAVI , LUO QIULIANG , WARREN ROBERT W , ABDALI USAMA K
- Assignee: SKYWORKS SOLUTIONS INC,SHEN HONG,RAMANATHAN RAVI,LUO QIULIANG,WARREN ROBERT W,ABDALI USAMA K
- Current Assignee: SKYWORKS SOLUTIONS INC,SHEN HONG,RAMANATHAN RAVI,LUO QIULIANG,WARREN ROBERT W,ABDALI USAMA K
- Priority: US37769006 2006-03-16
- Main IPC: H01L21/283
- IPC: H01L21/283 ; H01L21/3205 ; H01L21/60 ; H01L23/492
Abstract:
A gallium arsenide device (11) has a GaAs substrate (14) and a copper contact layer (21) for making electrical ground contact with a pad (16) of a target device. The copper contact layer is isolated from the GaAs substrate via a diffusion barrier layer (23), such as a nickel vanadium (NiV) layer. An organic solder preservative may coat the exposed copper to reduce oxidation effects. A gold or copper seed layer may be deposited prior to depositing the copper contact layer. The copper contact layer (21) can be directly soldered (18) to the contact pad (16), implying that the contact pad does not require an adhesive overflow area and can be made relatively small.
Information query
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