Invention Application
WO2007117294A3 SYSTEM AND METHOD FOR CONTINUOUS DEPOSITION OF GRADED COATINGS 审中-公开
用于连续沉积涂层的系统和方法

Abstract:
Embodiments of the invention include a deposition machine that allows for continuous deposition of an object or substrate with a coating having a graded composition. The deposition machine includes a deposition chamber separated into a plurality of chamber areas by a baffle having an opening. The opening allows for migration of deposition material from one chamber area to another, allowing for a graded composition coating to be deposited on the object or substrate. Other embodiments include a system for forming an electronic device and a system and method for forming a graded composition on an object.
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