公开(公告)号：WO2023049657A1

公开(公告)日：2023-03-30

申请号：PCT/US2022/076514

申请日：2022-09-15

Applicant: METOX TECHNOLOGIES, INC.

Inventor： DELANEY, Albert ,  KHANDAN, Shahab

IPC: H01L39/24 ,  H01B12/06 ,  C23C16/54 ,  H01B12/08 ,  H01B12/10 ,  H01L39/14

Abstract: A susceptor and susceptor assemblies used in a deposition reactor provides for high throughput while providing tailorable individual heat inputs and minimizes the build-up of errant deposition. The susceptor apparatus heats multiple substrate tapes or sections of a tape within the reactor upon which one or more thin films are deposited, particularly high temperature superconductor (HTS) thin films produced in a MOCVD reactor.

公开(公告)号：WO2022263198A1

公开(公告)日：2022-12-22

申请号：PCT/EP2022/065099

申请日：2022-06-02

Applicant: SIEMENS AKTIENGESELLSCHAFT

Inventor： JENSEN, Jens Dahl ,  KRÜGER, Ursus ,  WINKLER, Gabriele

IPC: C25B1/04 ,  C23C16/18 ,  C23C16/455 ,  C25B9/75 ,  C25B9/77 ,  C25B11/073 ,  C25B13/02 ,  B01D69/02 ,  C23C16/30 ,  C23C16/54 ,  C23C16/02 ,  C23C16/56

Abstract: Die Erfindung betrifft eine Ionen-Austausch-Membran für eine Elektrolyse-Zelle mit einer anodenseitigen Membran-Oberfläche zur Begrenzung eines Anoden-Raums der Elektrolyse-Zelle, einer der anodenseitigen Membran-Oberfläche abgewandten kathodenseitigen Membran-Oberfläche zur Begrenzung eines Kathoden-Raums der Elektrolyse-Zelle und mindestens einer direkt auf mindestens einer der Membran-Oberflächen aufgebrachten Redox-Katalysator-Beschichtung mit Redox-Katalysator-Material angegeben. Dabei weist die Redox-Katalysator-Beschichtung eine Gasphasen-Abscheidung auf. Die Erfindung betrifft auch ein Verfahren zum Herstellen der Ionen-Austausch-Membran, wobei folgende Verfahrensschritte durchgeführt werden: a) Bereitstellen einer Ausgangs-Ionen-Austausch-Membran mit einer anodenseitigen Ausgangs-Membran-Oberfläche und einer der anodenseitigen Ausgangs-Membran-Oberfläche abgewandten kathodenseitigen Ausgangs-Membran-Oberfläche und b) Anordnen zumindest einer Redox-Katalysator-Beschichtung auf zumindest einer der Ausgangs-Membran-Oberflächen, wobei zum Anordnen der Redox-Katalysator-Beschichtung ein Gas-Phasen-Abscheiden eines Redox-Katalysator-Materials und/oder eines Ausgangs-Materials (Precursor-Material) des Redox-Katalysator-Materials durchgeführt werden. Die Ionen-Austausch-Membran wird für eine Elektrolyse-Vorrichtung mit Elektrolyse-Zelle zur Wasser-Elektrolyse eingesetzt.

公开(公告)号：WO2022245513A1

公开(公告)日：2022-11-24

申请号：PCT/US2022/026655

申请日：2022-04-28

Applicant: APPLIED MATERIALS, INC.

Inventor： KUNDU, Sambhu ,  RAMACHANDRAPPA, PrasannaKalleshwara, Buddappa ,  HERLE, Subramanya, P. ,  SIVARAMAKRISHNAN, Visweswaren

IPC: C23C14/56 ,  C23C14/50 ,  C23C16/54

Abstract: Embodiments of the present disclosure generally relate to flexible substrate fabrication. In particular, embodiments described herein relate to an apparatus and methods for flexible substrate fabrication using nip rollers to improve tension uniformity. In one embodiment, a roller assembly includes a primary roller for transporting a flexible substrate, wherein the primary roller has a first end and a second end, wherein the flexible substrate has a coating disposed hereon, and wherein one or more edge regions are not covered by the coating. The roller assembly further includes a first nip roller disposed at the first end of the primary roller that contacts a first edge region of the one or more edge regions, and a second nip roller disposed at the second end of the primary roller that contacts a second edge region of the one or more edge regions.

公开(公告)号：WO2022240549A1

公开(公告)日：2022-11-17

申请号：PCT/US2022/025197

申请日：2022-04-18

Applicant: APPLIED MATERIALS, INC.

Inventor： BANGERT, Stefan ,  DEPPISCH, Thomas ,  BUSCHBECK, Wolfgang

IPC: C23C14/56 ,  C23C14/54 ,  C23C16/54 ,  C23C16/46 ,  C23C16/458 ,  C23C14/505 ,  C23C14/541 ,  C23C14/562 ,  C23C16/4584 ,  C23C16/463

Abstract: A roller (100) for transporting a flexible substrate is described. The roller (100) includes a first coolant supply (110) for cooling a first part (101) of the roller (100) and a second coolant supply (120) for cooling a second part (102) and a third part (103) of the roller (100). The first part (101) is provided between the second part (102) and the third part (103). Additionally, a vacuum processing apparatus including a roller and a method of cooling a roller are described.

公开(公告)号：WO2022235421A1

公开(公告)日：2022-11-10

申请号：PCT/US2022/025193

申请日：2022-04-18

Applicant: APPLIED MATERIALS, INC.

Inventor： SAUER, Andreas ,  HLADIK, Annemarie ,  KÖHLER, Bernhard ,  DEPPISCH, Thomas ,  ARMSTRONG, Claire ,  BUSCHBECK, Wolfgang

IPC: C23C14/56 ,  C23C14/54 ,  C23C14/22 ,  C23C16/54 ,  C23C16/46 ,  C23C16/455

Abstract: A roller (100) for transporting a flexible substrate (10) is described. The roller (100) includes a main body (101) having a plurality of gas supply slits (103) provided in an outer surface of the main body (101). The plurality of gas supply slits (103) extends in a direction of a central rotation axis (111) of the roller (100). Further, the roller (100) includes a sleeve (104) provided circumferentially around and in contact with the main body (101). The sleeve (104) has a plurality of gas outlets (105) extending in a radial direction (R) and being provided above the plurality of gas supply slits (103).

公开(公告)号：WO2022233177A1

公开(公告)日：2022-11-10

申请号：PCT/CN2022/077699

申请日：2022-02-24

Applicant: 隆基绿能科技股份有限公司

Inventor： 李梦飞 ,  姚宏 ,  成路 ,  赵领航 ,  段滨 ,  杜路路 ,  高攀红 ,  豆菲菲 ,  黄志鹏

IPC: C23C16/458 ,  C23C16/54 ,  C04B35/83 ,  C23C16/26

Abstract: 本公开公开一种辅助工装及预制件承载装置，涉及光伏拉晶技术领域，用于提高沉积炉的单次装炉量，提高沉积效率，降低生产成本。该辅助工装包括：至少一个基座和至少一个支撑板，每个支撑板设在相应基座上，每个支撑板具有贯穿支撑板的至少一个透气孔。当多个预制件叠置时，基座的至少部分部位位于至少一个预制件的第一腔体内或外，至少一个预制件位于相应支撑板上，位于相应支撑板上的预制件具有的第一腔体与相应支撑板具有的至少一个透气孔连通。所述预制件承载装置包括料柱以及上述辅助工装，本公开提供的辅助工装用于辅助多个预制件叠置在沉积炉内。本公开还公开一种用于预制体增密的装炉结构。

公开(公告)号：WO2022228969A1

公开(公告)日：2022-11-03

申请号：PCT/EP2022/060433

申请日：2022-04-20

Applicant: VOESTALPINE STAHL GMBH

Inventor： VANDEN BRANDE, Pierre

IPC: H01J37/32 ,  C23C14/56 ,  C23C16/54 ,  C23C14/02

Abstract: Method and corresponding device for plasma treating substrates (21) moving along a transport direction (5) through a treatment zone that is delimited in a direction transversal to said transport direction (5) by at least one wall (13) forming a diffuser panel presenting an aperture (23). The plasma is introduced into the treatment zone trough said aperture (23) and is generated by means of a plasma source connecting to the aperture (23). A multipolar cusp magnetic field is generated that extends along said wall (13) and at least partially around the aperture (23) and adjacent to this aperture (23) such that said plasma, entering the treatment zone trough said aperture (23), is distributed along said wall (13) in this treatment zone.

公开(公告)号：WO2022225074A1

公开(公告)日：2022-10-27

申请号：PCT/KR2021/004949

申请日：2021-04-20

Applicant: 주식회사 윈텍오토메이션

Inventor： 송일재 ,  전찬우 ,  안진혁

IPC: B25J15/06 ,  B25J15/00 ,  C23C16/54

Abstract: 본 발명은 초경인서트 제품의 CVD 코팅 및 회수를 위하여, 프레임, 팔레트 이송부, 코팅 트레이 이송부, 초경인서트 검사 및 반전부, 위치 검출용 무빙 카메라부 및 초경인서트 이송부를 포함하여 구성되는 CVD 코팅을 위한 초경인서트 로딩 및 언로딩 장비에서, CVD 코팅이 완료된 초경인서트 제품을 회수할 때, 상기 코팅 트레이 이송부의 CVD 코팅 트레이로부터 초경인서트 제품을 분리하기 위한 배큠 그립퍼 장치에 있어서, 상기 배큠 그립퍼 장치는, 상기 초경인서트 이송부의 툴 그립에 결합되는 회전 분리형 배큠 그립퍼 또는 타격 분리형 배큠 그립퍼를 포함하는 것을 특징으로 하는 CVD 코팅 트레이로부터 초경인서트 제품을 분리하기 위한 배큠 그립퍼 장치에 관한 것이다. 본 발명은 배큠 그립퍼 장치의 단부에 회전 분리형 캡 또는 타격 분리형 캡을 결합하여, CVD 코팅 시 코팅 트레이와 눌어붙은 상태의 초경인서트 제품을 안전하게 분리함으로서 픽업 실패 현상을 방지하여 제품의 그립 및 이송을 원활하게 하고 본체장비를 보호한다.

公开(公告)号：WO2022115328A1

公开(公告)日：2022-06-02

申请号：PCT/US2021/060130

申请日：2021-11-19

Applicant: APPLIED MATERIALS, INC.

Inventor： PANDA, Priyadarshi ,  LIAN, Lei ,  TEDESCHI, Leonard Michael

IPC: H01L21/67 ,  G01B11/06 ,  C23C16/54 ,  C23C16/52 ,  H01L27/108 ,  H01L21/66

Abstract: A method of forming a multi-layer stack on a substrate comprises: processing a substrate in a first process chamber using a first deposition process to deposit a first layer of a multi-layer stack on the substrate; removing the substrate from the first process chamber; measuring a first thickness of the first layer using an optical sensor; determining, based on the first thickness of the first layer, a target second thickness for a second layer of the multi-layer stack; determining one or more process parameter values for a second deposition process that will achieve the second target thickness for the second layer; and processing the substrate in a second process chamber using the second deposition process with the one or more process parameter values to deposit the second layer of the multi-layer stack approximately having the target second thickness over the first layer.

公开(公告)号：WO2022113034A1

公开(公告)日：2022-06-02

申请号：PCT/IB2021/061059

申请日：2021-11-29

Applicant: NANOBLEND S.R.L.

Inventor： CAPPELLARO, Marco

IPC: C23C14/00 ,  B44C1/175 ,  C23C14/20 ,  C23C14/56 ,  C23C16/01 ,  C23C16/06 ,  C23C16/54

Abstract: Method for obtaining and / or transferring a metal sheet, characterized in that: a roll of a bi-layer is prepared consisting of a water-soluble polymeric substrate and a sheet of said metal, said bi-layer is unrolled and the water-soluble polymeric substrate of said bi-layer is removed by means of jets of steam and / or water, to thus obtain said foil by itself, said sheet is dried by means of jets of hot air.