Invention Application
WO2007119524A1 電子放出素子及びその製造方法並びに電子放出素子を用いた光電変換素子、撮像装置及びフラットパネルディスプレイ装置 审中-公开
电子发射元件,其制造方法,使用电子发射元件的光电转换元件,成像装置和平板显示器

電子放出素子及びその製造方法並びに電子放出素子を用いた光電変換素子、撮像装置及びフラットパネルディスプレイ装置
Abstract:
An electron emission element comprising a lower electrode (2), an upper electrode (7), an electron supply layer (4) arranged on the lower electrode (2) side and an insulator layer (6) arranged on the upper electrode (7) side, the both layers being laminated between the lower electrode (2) and the upper electrode (7), and an electron emitting section including an opening region (HP) defined by an edge portion touching the electron supply layer (4) on the inner wall penetrating the insulator layer (6). The electron emitting section includes a carbon area (8) containing carbon, connected to the upper electrode (7) side and touching the electron supply layer (4) in the opening region (HP), and a partially crystallized polycrystalline portion (41) at that part of the electron supply layer (4) touching the carbon area (8). Area of the lower electrode (2) is set to be not smaller than four times that of the opening region (HP), and the lower electrode (2) overlaps the polycrystalline portion (41) so as to include it through the electron supply layer (4).
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