Invention Application
- Patent Title: BANDWIDTH CONTROL DEVICE
- Patent Title (中): 带宽控制装置
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Application No.: PCT/US2007/013875Application Date: 2007-06-11
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Publication No.: WO2007149282A2Publication Date: 2007-12-27
- Inventor: FOMENKOV, Igor, V. , PARTLO, William, N. , REILEY, Daniel, J. , HOWEY, James, K. , AGULIAR, Stanley, C.
- Applicant: CYMER, INC. , FOMENKOV, Igor, V. , PARTLO, William, N. , REILEY, Daniel, J. , HOWEY, James, K. , AGULIAR, Stanley, C.
- Applicant Address: 17075 Thommint court San Diego, CA 92127-2413 US
- Assignee: CYMER, INC.,FOMENKOV, Igor, V.,PARTLO, William, N.,REILEY, Daniel, J.,HOWEY, James, K.,AGULIAR, Stanley, C.
- Current Assignee: CYMER, INC.,FOMENKOV, Igor, V.,PARTLO, William, N.,REILEY, Daniel, J.,HOWEY, James, K.,AGULIAR, Stanley, C.
- Current Assignee Address: 17075 Thommint court San Diego, CA 92127-2413 US
- Agency: CRAY, William, C.
- Priority: US11/472,088 20060621
- Main IPC: H01S3/10
- IPC: H01S3/10
Abstract:
A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.
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