Invention Application
- Patent Title: METHOD OF SEPARATING SEMICONDUCTOR DIES
- Patent Title (中): 分离半导体器件的方法
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Application No.: PCT/US2007075402Application Date: 2007-08-07
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Publication No.: WO2008019377A3Publication Date: 2008-06-05
- Inventor: CHU JIUNN-YI , CHENG CHAO-CHEN , CHU CHEN-FU , DOAN TRUNG TRI
- Applicant: SEMI PHOTONICS CO LTD , CHU JIUNN-YI , CHENG CHAO-CHEN , CHU CHEN-FU , DOAN TRUNG TRI
- Assignee: SEMI PHOTONICS CO LTD,CHU JIUNN-YI,CHENG CHAO-CHEN,CHU CHEN-FU,DOAN TRUNG TRI
- Current Assignee: SEMI PHOTONICS CO LTD,CHU JIUNN-YI,CHENG CHAO-CHEN,CHU CHEN-FU,DOAN TRUNG TRI
- Priority: US82160806 2006-08-07
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/50
Abstract:
A method for the separation of multiple dies during semiconductor fabrication is described. On an upper surface of a semiconductor wafer containing multiple dies, a seed metal layer may be used to grow hard metal layers above it for handling. Metal may be plated above these metal layers everywhere except where a block of stop electroplating (EP) material exists. The stop EP material may be obliterated, and a barrier layer may be formed above the entire remaining structure. The substrate may be removed, and the individual dies may have any desired bonding pads and/or patterned circuitry added to the semiconductor surface. The remerged hard metal after laser cutting and heating should be strong enough for handling. Tape may be added to the wafer, and a breaker may be used to break the dies apart. The resulting structure may be flipped over, and the tape may be expanded to separate the individual dies.
Information query
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