Invention Application
- Patent Title: PRESSURE BURST FREE HIGH CAPACITY CRYOPUMP
- Patent Title (中): 压力冲击自由高容量CRYOPUMP
-
Application No.: PCT/US2008/000497Application Date: 2008-01-15
-
Publication No.: WO2008088794A2Publication Date: 2008-07-24
- Inventor: BARTLETT, Allen, J. , DRISCOLL, Michael, A. , EACOBACCI, Michael, J., Jr. , JOHNSON, William, L. , SULLIVAN, Robert, P. , SYSSOEV, Sergei , STIRA, Mark, A. , CASELLO, John, J.
- Applicant: BROOKS AUTOMATION, INC. , BARTLETT, Allen, J. , DRISCOLL, Michael, A. , EACOBACCI, Michael, J., Jr. , JOHNSON, William, L. , SULLIVAN, Robert, P. , SYSSOEV, Sergei , STIRA, Mark, A. , CASELLO, John, J.
- Applicant Address: 15 Elizabeth Drive Building 11 Chelmsford, MA 01824 US
- Assignee: BROOKS AUTOMATION, INC.,BARTLETT, Allen, J.,DRISCOLL, Michael, A.,EACOBACCI, Michael, J., Jr.,JOHNSON, William, L.,SULLIVAN, Robert, P.,SYSSOEV, Sergei,STIRA, Mark, A.,CASELLO, John, J.
- Current Assignee: BROOKS AUTOMATION, INC.,BARTLETT, Allen, J.,DRISCOLL, Michael, A.,EACOBACCI, Michael, J., Jr.,JOHNSON, William, L.,SULLIVAN, Robert, P.,SYSSOEV, Sergei,STIRA, Mark, A.,CASELLO, John, J.
- Current Assignee Address: 15 Elizabeth Drive Building 11 Chelmsford, MA 01824 US
- Agency: SMITH, James, M. et al.
- Priority: US60/880,859 20070117; US60/897,666 20070126
Abstract:
A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
Information query