公开(公告)号：WO2008143766A3

公开(公告)日：2009-04-09

申请号：PCT/US2008005567

申请日：2008-04-30

Applicant: BROOKS AUTOMATION INC ,  BARTLETT ALLEN J ,  KRAUS JOSEPH A ,  EACOBACCI MICHAEL J JR

Inventor： BARTLETT ALLEN J ,  KRAUS JOSEPH A ,  EACOBACCI MICHAEL J JR

IPC: H01L21/00

CPC classification number: H01L21/67173 ,  H01L21/6719

Abstract: A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.

Abstract translation: 集群工具具有传送室和负载锁定室。 适配器被配置为联接在传送室和装载锁定室之间。 适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。 适配器外壳形成通过内部空间的基板路径。 第一个阀连接内部空间和负载锁定室。 第二个阀连接内部空间和传送室。 低温表面与适配器相关联。 其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。 低温表面构造成有选择地排空内部空间。 晶片适于沿着路径移动通过第一阀并通过适配器壳体。 一旦第二个阀打开，晶片就会通过出口移动到传送室中。 该适配器可以应用于处理室以及加载锁定。

公开(公告)号：WO2012016192A3

公开(公告)日：2012-02-02

申请号：PCT/US2011/045977

申请日：2011-07-29

Applicant: BROOKS AUTOMATION, INC. ,  BARTLETT, Allen, J. ,  EACOBACCI, Michael, J., Jr. ,  SYSSOEV, Sergei

Inventor： BARTLETT, Allen, J. ,  EACOBACCI, Michael, J., Jr. ,  SYSSOEV, Sergei

IPC: F25B9/10

Abstract: A refrigeration system includes a first refrigerator having a first cooling load at a first temperature and a second refrigerator having a second cooling load at a second temperature. Also included is a thermal coupling between the two refrigerators to share thermal load, e.g., cooling load, between the refrigerators, the coupling being restricted to maintain a difference between the first and second temperatures. A cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators. The thermal coupling can be formed in a base plate of the radiation shield, the base plate having varying cross-sectional area to maintain a substantially uniform temperature at a periphery of the base plate.

公开(公告)号：WO2008088794A2

公开(公告)日：2008-07-24

申请号：PCT/US2008/000497

申请日：2008-01-15

Applicant: BROOKS AUTOMATION, INC. ,  BARTLETT, Allen, J. ,  DRISCOLL, Michael, A. ,  EACOBACCI, Michael, J., Jr. ,  JOHNSON, William, L. ,  SULLIVAN, Robert, P. ,  SYSSOEV, Sergei ,  STIRA, Mark, A. ,  CASELLO, John, J.

Inventor： BARTLETT, Allen, J. ,  DRISCOLL, Michael, A. ,  EACOBACCI, Michael, J., Jr. ,  JOHNSON, William, L. ,  SULLIVAN, Robert, P. ,  SYSSOEV, Sergei ,  STIRA, Mark, A. ,  CASELLO, John, J.

CPC classification number: F04B37/08

Abstract: A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.

Abstract translation: 低温泵包括至少具有第一和第二阶段的冰箱。 辐射屏蔽围绕第二级并与第一级热接触。 辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。 低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。 第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。 挡板设置在排水孔上。 挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。 挡板引导气体冷凝在主冷凝表面上。

公开(公告)号：WO2008088794A3

公开(公告)日：2009-03-26

申请号：PCT/US2008000497

申请日：2008-01-15

Applicant: BROOKS AUTOMATION INC ,  BARTLETT ALLEN J ,  DRISCOLL MICHAEL A ,  EACOBACCI MICHAEL J JR ,  JOHNSON WILLIAM L ,  SULLIVAN ROBERT P ,  SYSSOEV SERGEI ,  STIRA MARK A ,  CASELLO JOHN J

Inventor： BARTLETT ALLEN J ,  DRISCOLL MICHAEL A ,  EACOBACCI MICHAEL J JR ,  JOHNSON WILLIAM L ,  SULLIVAN ROBERT P ,  SYSSOEV SERGEI ,  STIRA MARK A ,  CASELLO JOHN J

IPC: F04B37/08

CPC classification number: F04B37/08

Abstract: A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.

Abstract translation: 低温泵包括至少具有第一和第二阶段的冰箱。 辐射屏蔽围绕第二级并与第一级热接触。 辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。 低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。 第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。 挡板设置在排水孔的上方。 挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。 挡板引导气体冷凝在主冷凝表面上。

公开(公告)号：WO2008143766A8

公开(公告)日：2009-02-19

申请号：PCT/US2008005567

申请日：2008-04-30

Applicant: BROOKS AUTOMATION INC ,  BARTLETT ALLEN J ,  KRAUS JOSEPH A ,  EACOBACCI MICHAEL J JR

Inventor： BARTLETT ALLEN J ,  KRAUS JOSEPH A ,  EACOBACCI MICHAEL J JR

IPC: H01L21/00

CPC classification number: H01L21/67173 ,  H01L21/6719

Abstract: A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.

Abstract translation: 集群工具具有传送室和负载锁定室。 适配器被配置为联接在传送室和装载锁定室之间。 适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。 适配器外壳形成通过内部空间的基板路径。 第一个阀连接内部空间和负载锁定室。 第二个阀连接内部空间和传送室。 低温表面与适配器相关联。 其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。 低温表面构造成有选择地排空内部空间。 晶片适于沿着路径移动通过第一阀并通过适配器壳体。 一旦第二个阀打开，晶片就会通过出口移动到传送室中。 该适配器可以应用于处理室以及加载锁定。

公开(公告)号：WO2012016192A2

公开(公告)日：2012-02-02

申请号：PCT/US2011045977

申请日：2011-07-29

Applicant: BROOKS AUTOMATION INC ,  BARTLETT ALLEN J ,  EACOBACCI MICHAEL J JR ,  SYSSOEV SERGEI

Inventor： BARTLETT ALLEN J ,  EACOBACCI MICHAEL J JR ,  SYSSOEV SERGEI

IPC: F25D13/02

CPC classification number: B01D8/00 ,  F04B37/08 ,  F04B37/14 ,  F25B7/00 ,  F25B9/10 ,  F25D19/006

Abstract: A refrigeration system includes a first refrigerator having a first cooling load at a first temperature and a second refrigerator having a second cooling load at a second temperature. Also included is a thermal coupling between the two refrigerators to share thermal load, e.g., cooling load, between the refrigerators, the coupling being restricted to maintain a difference between the first and second temperatures. A cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators. The thermal coupling can be formed in a base plate of the radiation shield, the base plate having varying cross-sectional area to maintain a substantially uniform temperature at a periphery of the base plate.

Abstract translation: 一种制冷系统包括具有处于第一温度的第一冷却负载的第一冰箱和具有处于第二温度的第二冷却负载的第二冰箱。 还包括两个制冷机之间的热耦合以在冰箱之间共享热负载（例如，冷却负载），耦合被限制为保持第一和第二温度之间的差异。 低温泵包括具有至少第一和第二级的第一冰箱和第二冰箱。 第一冰箱的第一级与第二冰箱的冷端之间的热耦合被限制以维持第二冰箱的冷端与第一冰箱的第一级之间的温差。 低温泵还包括与第二冰箱的冷端热接触的辐射护罩以及与辐射护罩隔开并由辐射护罩围绕并且与第一冷却器的第二级（例如最冷级）热接触的冷凝表面 冰箱。 受限的热耦合可以配置为平衡两个冰箱的冷负荷。 热耦合可形成在辐射屏蔽件的基板中，基板具有变化的横截面面积以在基板的周边处维持基本上均匀的温度。

公开(公告)号：WO2011143398A1

公开(公告)日：2011-11-17

申请号：PCT/US2011/036213

申请日：2011-05-12

Applicant: BROOKS AUTOMATION, INC. ,  BARTLETT, Allen, J. ,  JOHNSON, William ,  COLLINS, Mark ,  SYSSOEV, Sergei ,  O'NEIL, James, A. ,  EACOBACCI, Michael, J., Jr.

Inventor： BARTLETT, Allen, J. ,  JOHNSON, William ,  COLLINS, Mark ,  SYSSOEV, Sergei ,  O'NEIL, James, A. ,  EACOBACCI, Michael, J., Jr.

IPC: F25B7/00 ,  F25B9/14

CPC classification number: F25B7/00 ,  F25B9/002 ,  F25B9/006 ,  F25B9/02 ,  F25B9/14 ,  F25B2400/01 ,  F25B2400/06 ,  F25B2600/0251 ,  F25B2600/0253 ,  F25B2700/21 ,  Y02B30/741 ,  Y10T279/34

Abstract: In accordance with an embodiment of the invention, there is provided a system for cooling a load. The system comprises a closed loop primary refrigeration system comprising: a primary compressor taking in a primary refrigerant at a low pressure and discharging the primary refrigerant at a high pressure; an insulated enclosure comprising an inlet receiving the primary refrigerant at the high pressure from the primary compressor and an outlet returning the primary refrigerant at the low pressure to the primary compressor; at least one heat exchanger within the insulated enclosure receiving the primary refrigerant at the high pressure and cooling the primary refrigerant using a secondary refrigerant from a secondary refrigeration system, the secondary refrigerant being in heat exchange relationship with the primary refrigerant in the at least one heat exchanger; an expansion unit within the insulated enclosure receiving the primary refrigerant at the high pressure from the at least one heat exchanger and discharging the primary refrigerant at the low pressure; and a supply line delivering the primary refrigerant at the low pressure to the load and a return line returning the primary refrigerant from the load to the primary refrigeration system. The system further comprises the secondary refrigeration system, wherein the secondary refrigeration system comprises at least one secondary cryogenic refrigerator. A system control unit controls operation of at least one of the primary refrigeration system and the secondary refrigeration system to provide a variable refrigeration capacity to the load based on at least one of: a pressure of the primary refrigerant delivered to the load, and at least one temperature of the load.

Abstract translation: 根据本发明的实施例，提供了一种用于冷却负载的系统。 该系统包括闭环主要制冷系统，其包括：初级压缩机，其在低压下接收初级制冷剂并在高压下排出初级制冷剂; 绝缘外壳，其包括接收来自主压缩机的高压下的初级制冷剂的入口和将低压下的初级制冷剂返回到主压缩机的出口; 所述绝热壳体内的至少一个热交换器接收高压下的初级制冷剂并且使用来自二次制冷系统的二次制冷剂冷却所述初级制冷剂，所述二次制冷剂在所述至少一个热量中与所述初级制冷剂处于热交换关系 器; 所述绝缘壳体内的膨胀单元接收来自所述至少一个热交换器的高压下的所述初级制冷剂，并且在所述低压下排出所述初级制冷剂; 以及将低压下的一次制冷剂输送到负载的供给管线和将一次制冷剂从负载返回到主制冷系统的返回管路。 该系统还包括二次制冷系统，其中次级制冷系统包括至少一个二次低温冰箱。 系统控制单元控制主要制冷系统和次级制冷系统中的至少一个的操作，以向负载提供可变的制冷能力，其基于以下至少一个：输送到负载的一次制冷剂的压力，并且至少 一个温度的负载。