Invention Application
WO2008147098A1 APPARATUS FOR MEASUREMENT OF THREE-DIMENSIONAL SHAPE 审中-公开
三维形状测量装置

APPARATUS FOR MEASUREMENT OF THREE-DIMENSIONAL SHAPE
Abstract:
An apparatus for measurement of a three-dimensional shape includes a light source, a beam splitter splitting a light emitted from the light source, a measured object projected with the light from the light source, having a height difference between a highest point and a lowest point thereof, a reference plane projected with the light emitted from the beam splitter, a photographing device photographing an interference fringe formed by the lights reflected from a surface of the measured object and from the reference plane and composed, and a controlling computer processing the image photographed by the photographing device. The reference plane further includes a reflection path adjusting unit which supplies reflection paths respectively equal to a reflection path from the highest point and a reflection path from the lowest point of the measured object.
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