公开(公告)号：WO2008111758A1

公开(公告)日：2008-09-18

申请号：PCT/KR2008/001260

申请日：2008-03-05

Applicant: INTEKPLUS CO., LTD ,  KO, Seung-Gyu ,  LIM, Ssang-gun ,  LEE, Sang-yun ,  SONG, Kyoung-Soo

Inventor： KO, Seung-Gyu ,  LIM, Ssang-gun ,  LEE, Sang-yun ,  SONG, Kyoung-Soo

IPC: H01L21/66

CPC classification number: G06T7/0004 ,  G01N21/94 ,  G06T2207/30148

Abstract: An apparatus for inspection of semiconductor device and method for inspection by the same are disclosed. The apparatus for inspection of semiconductor device includes air cleaners and a brush cleaner to automatically remove contaminants present on the exterior of the semiconductor devices, prior to performing vision inspections using the vision inspecting device, thereby reducing the number of semiconductor devices which have been determined to be defective due to contaminants, and consequently, improving a yield of semiconductor devices.

Abstract translation: 公开了一种半导体装置的检查装置及其检查方法。 在使用视觉检查装置进行视觉检查之前，半导体装置的检查装置包括空气净化器和刷子清洁器，以自动去除存在于半导体器件外部的污染物，从而减少已经确定为 由于污染物而有缺陷，因此提高了半导体器件的产量。

公开(公告)号：WO2002082009A1

公开(公告)日：2002-10-17

申请号：PCT/KR2001/001840

申请日：2001-10-31

Applicant: INTEK PLUS CO., LTD. ,  LIM, Ssang-gun ,  KIM, Gee-hong ,  CHOI, Yi-bae ,  LEE, Sang-yoon

Inventor： LIM, Ssang-gun ,  KIM, Gee-hong ,  CHOI, Yi-bae ,  LEE, Sang-yoon

IPC: G01B11/00

CPC classification number: G01B11/2509 ,  G01B2210/50

Abstract: A method and apparatus for measuring the three-dimensional surface shape of an object using color informations of light reflected by the object. The method ans apparatus for measuring the three-dimensional surface shape of the object, in which a real-time measurement of the three-dimensional surface is performed by projecting a beam of light having color information onto the object and detecting color distributin information according to levels of the object, thereby obtaining level information of the object.

Abstract translation: 一种使用由对象反射的光的颜色信息来测量对象的三维表面形状的方法和装置。 用于测量物体的三维表面形状的方法和装置，其中通过将具有颜色信息的光束投影到对象上并根据以下方式检测颜色分布信息来执行三维表面的实时测量 对象的级别，从而获得对象的级别信息。

公开(公告)号：WO2013039340A3

公开(公告)日：2013-05-10

申请号：PCT/KR2012007352

申请日：2012-09-13

Applicant: INTEKPLUS CO LTD ,  SON JAI-HO ,  LEE HYUN-MIN ,  KANG MIN-GU ,  LEE SANG-YOON ,  LIM SSANG-GUN

Inventor： SON JAI-HO ,  LEE HYUN-MIN ,  KANG MIN-GU ,  LEE SANG-YOON ,  LIM SSANG-GUN

IPC: G01N21/956 ,  G01B11/30 ,  G02F1/13

CPC classification number: G06T7/0004 ,  G01N21/95 ,  G01N2021/9513 ,  G02F1/1309 ,  G06T2207/30121 ,  H04N7/18

Abstract: Disclosed is a method for inspecting a flat panel. The method for inspecting the flat panel includes the steps of: arranging a camera at a measurement location of the flat panel by horizontally moving at least one of the flat panel and the camera; automatically focusing the camera with respect to a measuring target of the flat panel at the measurement location; acquiring a plurality of images for the measuring target by vertically moving the camera within a set region on the basis of the present location of the camera when focusing the camera; selecting the image having the most definition for the measuring target among the acquired images; processing the selected image; and determining whether the measuring target is defective or not.

Abstract translation: 公开了一种用于检查平板的方法。 用于检查平板的方法包括以下步骤：通过水平移动平板和照相机中的至少一个来将照相机布置在平板的测量位置处; 自动将摄像机相对于测量位置处的平板的测量目标进行聚焦; 通过在对照相机聚焦时基于照相机的当前位置在设定区域内垂直移动照相机来获取用于测量目标的多个图像; 在获取的图像中选择测量对象的分辨率最高的图像; 处理选择的图像; 并确定测量目标是否有缺陷。

公开(公告)号：WO2009078616A4

公开(公告)日：2009-10-08

申请号：PCT/KR2008007313

申请日：2008-12-10

Applicant: INTEKPLUS CO LTD ,  YOU JOON-HO ,  KANG MINGU ,  LIM SSANG-GUN

Inventor： YOU JOON-HO ,  KANG MINGU ,  LIM SSANG-GUN

IPC: G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02028 ,  G01B2290/35

Abstract: The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.

Abstract translation: 该三维形状测量装置包括光源; 分束器，用于分离来自光源的照明光; 要测量的目标物体，其在最高点和最低点之间具有高度差; 参考反射镜，其上照射从分束器发射的另一个光束; 光检测元件，用于检测由所述目标物体的表面反射的物体光束与由所述参考反射镜的表面反射的参考光束的干涉而产生的干涉图案; 以及控制计算机，用于处理由光检测元件检测到的图像，其中，在分束器和参考镜之间设置辅助参考光束产生单元，用于改变来自分束器的光束的光路以产生辅助参考光束 。

公开(公告)号：WO2009078616A2

公开(公告)日：2009-06-25

申请号：PCT/KR2008/007313

申请日：2008-12-10

Applicant: INTEKPLUS CO., LTD ,  YOU, Joon-Ho ,  KANG, MinGu ,  LIM, Ssang-gun

Inventor： YOU, Joon-Ho ,  KANG, MinGu ,  LIM, Ssang-gun

IPC: G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02028 ,  G01B2290/35

Abstract: The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.

Abstract translation: 该三维形状测量装置包括光源; 分束器，用于分离来自光源的照明光; 要测量的目标物体，其在最高点和最低点之间具有高度差; 参考反射镜，其上照射从分束器发射的另一个光束; 光检测元件，用于检测由所述目标物体的表面反射的物体光束与由所述参考反射镜的表面反射的参考光束的干涉而产生的干涉图案; 以及控制计算机，用于处理由光检测元件检测到的图像，其中，在分束器和参考镜之间设置辅助参考光束产生单元，用于改变来自分束器的光束的光路以产生辅助参考光束

公开(公告)号：WO2008143471A1

公开(公告)日：2008-11-27

申请号：PCT/KR2008/002866

申请日：2008-05-22

Applicant: INTEKPLUS CO., LTD ,  LIM, Ssang-gun ,  LEE, Sang-yun ,  CHOI, Ho-Keun ,  KO, Seung-Gyu

Inventor： LIM, Ssang-gun ,  LEE, Sang-yun ,  CHOI, Ho-Keun ,  KO, Seung-Gyu

IPC: H01L21/66

CPC classification number: B07C5/3422 ,  G01N21/95

Abstract: A semiconductor package inspecting system includes a loading unit, a first vision inspection unit for visually inspecting a first surface of the semiconductor package, a second vision inspection unit for two-dimensionally inspecting a second surface of the semiconductor package using a color camera, a tray transfer device for transferring, a third vision inspection unit for two-dimensionally inspecting the second surface of the semiconductor package using a line scan camera, an unloading unit for allowing a tray having good-quality semiconductor devices received therein to be stacked therein, a fourth vision inspection unit for two-dimensionally inspecting the first surface of the semiconductor package using a line scan camera, a inverting device for transferring the tray, a reject unit for sorting and receiving defective semiconductor devices, and a sorting device for sorting the visually inspected semiconductor packages.

Abstract translation: 半导体封装检查系统包括加载单元，用于目视检查半导体封装的第一表面的第一视觉检查单元，用于使用彩色相机二维地检查半导体封装的第二表面的第二视觉检查单元，托盘 用于传送的传送装置，用于使用线扫描照相机二维地检查半导体封装的第二表面的第三视觉检查单元，用于允许其中容纳有其中容纳有优质半导体器件的托盘堆叠在其中的卸载单元，第四 视线检查单元，用于使用线扫描照相机二维地检查半导体封装的第一表面，用于传送托盘的反转装置，用于分类和接收有缺陷的半导体器件的拒收单元，以及用于对目视检查的半导体进行分类的分类装置 包。

公开(公告)号：WO2007046601A1

公开(公告)日：2007-04-26

申请号：PCT/KR2006/004172

申请日：2006-10-16

Applicant: INTEKPLUS CO., LTD. ,  LEE, Sang-yoon ,  CHOI, Yi-bae ,  KANG, Min-gu ,  LIM, Ssang-gun

Inventor： LEE, Sang-yoon ,  CHOI, Yi-bae ,  KANG, Min-gu ,  LIM, Ssang-gun

IPC: H01L27/146 ,  H04N5/335

CPC classification number: G01B11/25 ,  G01B11/0608 ,  H01L27/148 ,  H04N13/207 ,  H04N13/254

Abstract: An image measuring apparatus for acquiring an image captured by an optical system and a method thereof are disclosed. The apparatus includes a CCD camera for capturing the object and outputting the captured image, a lamp for generating light to illuminate a capturing area of the object, an illumination controller for controlling the lamp to be turned on, a projection grating formed with gratings, a projection grating driving unit for adjusting a distance between the projection grating and the object, an image capturing device for acquiring the image captured by the CCD camera, a driving signal generator for outputting a driving signal to the illumination controller, the projection grating driving unit, and the image capturing unit simultaneously according to an enable signal generated from the CCD camera, and an image signal processor for estimating a three-dimensional image of the object from data transmitted from the image capturing unit.

Abstract translation: 公开了一种用于获取由光学系统捕获的图像的图像测量装置及其方法。 该装置包括用于捕获物体并输出所捕获的图像的CCD照相机，用于产生用于照射被摄体的拍摄区域的光的灯，用于控制被导通的灯的照明控制器，形成有光栅的投影光栅， 投影光栅驱动单元，用于调整投影光栅和物体之间的距离，用于获取由CCD照相机拍摄的图像的图像捕获装置，用于向照明控制器输出驱动信号的驱动信号发生器，投影光栅驱动单元， 以及根据从CCD照相机产生的使能信号同时进行图像捕获单元，以及图像信号处理器，用于根据从图像捕获单元发送的数据估计对象的三维图像。

公开(公告)号：WO2004029548A1

公开(公告)日：2004-04-08

申请号：PCT/KR2003/001715

申请日：2003-08-25

Applicant: INTEK PLUS CO., LTD ,  LIM, Ssang-Gun ,  CHOI, Ee-Bae ,  LEE, Sang-Yoon ,  CHO, Sang-Hyun ,  KIM, Tae-Wahn ,  JANG, Suk-June

Inventor： LIM, Ssang-Gun ,  CHOI, Ee-Bae ,  LEE, Sang-Yoon ,  CHO, Sang-Hyun ,  KIM, Tae-Wahn ,  JANG, Suk-June

IPC: G01B11/30

CPC classification number: G06K9/2027 ,  H04N5/2354 ,  H04N5/335

Abstract: An apparatus and method for capturing picked-up images at a high speed.The apparatus includes a CCD (Charge Coupled Device) camera for picking up images of an object placed at a pickup area and outputting the picked-up images; a synchronous signal generator for generating an illumination control signal every time a frame enable signal outputted from the CCD camera is detected; an illumination controller for controlling an operation of turning on light sources surrounding the pickup area at different positions in response to the illumination control signal; and an image capture unit for capturing an image outputted from the CCD camera every time the frame enable signal is detected, and transmitting the captured image to an image signal processor.

Abstract translation: 一种用于高速捕获拍摄图像的装置和方法。该装置包括用于拾取放置在拾取区域处的物体的图像并输出拾取图像的CCD（电荷耦合装置）照相机; 每当从CCD摄像机输出的帧使能信号被检测到时，产生照明控制信号的同步信号发生器; 照明控制器，用于响应于所述照明控制信号，控制在不同位置处接收围绕所述拾取区域的光源的操作; 以及图像捕获单元，用于在每次检测到帧使能信号时捕获从CCD照相机输出的图像，并将捕获的图像发送到图像信号处理器。

公开(公告)号：WO2009078617A3

公开(公告)日：2009-08-13

申请号：PCT/KR2008007314

申请日：2008-12-10

Applicant: INTEKPLUS CO LTD ,  LEE SANG-YUN ,  KANG MINGU ,  LIM SSANG-GUN

Inventor： LEE SANG-YUN ,  KANG MINGU ,  LIM SSANG-GUN

IPC: G01B11/24

CPC classification number: G01B11/2441

Abstract: The surface shape measuring system includes an illumination unit including a main light source, a focusing lens, and a projection lens; a beam splitter to split illumination light emitted respectively irradiated onto a reference surface and a measurement surface; a light detecting element to capture an interference pattern; and a control computer to obtain surface shape data through white-light interference pattern analysis from an image captured and detect whether or not the measurement surface is defective from the obtained data, wherein a subsidiary light source to provide falling illumination to the target object; and two-dimensional data and three-dimensional data regarding the surface shape of the target object are obtained by selectively intermitting the turning-on of the main light source and the subsidiary light source and the irradiation of the illumination light onto the reference surface.

Abstract translation: 所述表面形状测量系统包括：包括主光源，聚焦透镜和投影透镜的照明单元; 分光器，用于将分别照射到参考表面和测量表面上的照射光分离; 用于捕获干涉图案的光检测元件; 以及控制计算机，通过从所拍摄的图像通过白光干涉图案分析获得表面形状数据，并从所获得的数据检测测量表面是否有缺陷，其中辅助光源向目标物体提供落下的照明; 并且通过选择性地将主光源和辅助光源的接通以及照射光照射到参考表面上来获得关于目标物体的表面形状的二维数据和三维数据。

公开(公告)号：WO2009078616A3

公开(公告)日：2009-08-13

申请号：PCT/KR2008007313

申请日：2008-12-10

Applicant: INTEKPLUS CO LTD ,  YOU JOON-HO ,  KANG MINGU ,  LIM SSANG-GUN

Inventor： YOU JOON-HO ,  KANG MINGU ,  LIM SSANG-GUN

IPC: G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02028 ,  G01B2290/35

Abstract: The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.

Abstract translation: 三维形状测量装置包括光源; 分束器，用于分离来自光源的照明光; 要测量的目标对象，具有最高点和最低点之间的高度差; 参考镜，在其上照射从分束器发射的另一个光束; 光检测元件，用于检测由目标物体的表面反射的物体光束的干涉产生的干涉图案和由参考反射镜的表面反射的参考光束; 以及控制计算机，用于处理由光检测元件检测到的图像，其中，在分束器和参考镜之间设置有用于改变来自分束器的光束的光路以产生辅助参考光束的辅助参考光束产生单元 。