Invention Application
WO2009026126A3 CONVERGENT-DIVERGENT-CONVERGENT NOZZLE FOCUSING OF AEROSOL PARTICLES FOR MICRON-SCALE DIRECT WRITING
审中-公开
用于微尺度直接写入的气溶胶颗粒聚合 - 分解 - 聚合喷嘴聚焦
- Patent Title: CONVERGENT-DIVERGENT-CONVERGENT NOZZLE FOCUSING OF AEROSOL PARTICLES FOR MICRON-SCALE DIRECT WRITING
- Patent Title (中): 用于微尺度直接写入的气溶胶颗粒聚合 - 分解 - 聚合喷嘴聚焦
-
Application No.: PCT/US2008073257Application Date: 2008-08-15
-
Publication No.: WO2009026126A3Publication Date: 2009-10-29
- Inventor: HOEY JUSTIN MICHAEL , AKHATOV ISKANDER S , SWENSON ORVEN FREDRICK , SCHULZ DOUGLAS LLOYD
- Applicant: NDSU RES FOUNDATION , HOEY JUSTIN MICHAEL , AKHATOV ISKANDER S , SWENSON ORVEN FREDRICK , SCHULZ DOUGLAS LLOYD
- Assignee: NDSU RES FOUNDATION,HOEY JUSTIN MICHAEL,AKHATOV ISKANDER S,SWENSON ORVEN FREDRICK,SCHULZ DOUGLAS LLOYD
- Current Assignee: NDSU RES FOUNDATION,HOEY JUSTIN MICHAEL,AKHATOV ISKANDER S,SWENSON ORVEN FREDRICK,SCHULZ DOUGLAS LLOYD
- Priority: US95649307 2007-08-17
- Main IPC: B05B5/00
- IPC: B05B5/00 ; B05B3/02 ; B05B5/12
Abstract:
A Convergent-Divergent-Convergent nozzle apparatus for direct-whte applications is described. The tip apparatus includes at least three nozzles concentrically positioned in series. In a non-limiting embodiment, a first nozzle has a converging taper, a second nozzle extends from the first nozzle with a diverging taper, and a third nozzle extends from the second nozzle and has a converging taper. The nozzles are positioned in series and are coaxial, and can be formed from either separate components or a monolithic structure. Such an arrangement has permitted direct writing of aerosolized particle streams in line widths from 3.7 - 8 µm in width prior to sintering. Further refinements to the apparatus and processing parameters may result in line widths of 1 µm or less. Aerosolized particles may comprise conductor or semiconductor precursors that may be processed into microelectronic conductors or semiconductors, respectively. The particles may also comprise nanostructures or nanoparticles.
Information query